EP 1403984 A3 20050112 - Laser light source device and surface inspection apparatus employing the same

Title (en)

Laser light source device and surface inspection apparatus employing the same

Title (de)

Laserlichtquelle und Oberflächeninspektionsvorrichtung unter Verwendung derselben

Title (fr)

Source de lumière laser et appareil d'inspection de surface qui l'utilise

Publication

EP 1403984 A3 20050112 (EN)

Application

EP 03090310 A 20030923

Priority

JP 2002276870 A 20020924
JP 2003313809 A 20030905

Abstract (en)

[origin: EP1403984A2] In a laser light source device (2), a light source unit (11) is constructed by one condenser lens (14) for condensing a laser beam emitted from one semiconductor Laser (12), another condenser lens (15) for condensing a laser beam emitted from another semiconductor laser (13), and a focusing lene (17) for focusing and projecting the laser beam condensed by one condenser lens and the laser beam condensed by another lens onto an incident face (16a) of one light guiding means. <IMAGE>

IPC 1-7

G01N 21/00; G02B 6/42; G02B 27/10; H01S 5/40; G02B 27/16

IPC 8 full level

G01N 21/47 (2006.01); G01N 21/84 (2006.01); G01N 21/95 (2006.01); G01N 21/956 (2006.01); G02B 6/28 (2006.01); G02B 6/42 (2006.01); G02B 27/18 (2006.01); H01L 21/66 (2006.01); G02B 6/32 (2006.01)

CPC (source: EP KR US)

G01N 21/47 (2013.01 - EP US); G01N 21/9501 (2013.01 - EP US); G02B 6/2848 (2013.01 - EP US); G02B 6/4206 (2013.01 - EP US); G02B 27/18 (2013.01 - KR); G02B 6/32 (2013.01 - EP US); G02B 6/425 (2013.01 - EP US)

Citation (search report)

[XY] WO 0057229 A1 20000928 - LIGHT SOLUTIONS CORP [US]
[XY] WO 0250599 A1 20020627 - RAYTEQ PHOTONIC SOLUTIONS LTD [IL], et al
[Y] US 2001035951 A1 20011101 - ISOZAKI HISASHI [JP], et al
[T] DE 19859211 A1 20000720 - GRIMM AEROSOL TECHNIK GMBH & C [DE]
[T] DE 3641716 A1 19880616 - PALAS GMBH [DE]

Designated contracting state (EPC)

AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR

DOCDB simple family (publication)

EP 1403984 A2 20040331; EP 1403984 A3 20050112; CN 100367055 C 20080206; CN 1497291 A 20040519; JP 2004138603 A 20040513; KR 100552552 B1 20060214; KR 20040026617 A 20040331; US 2004095572 A1 20040520

DOCDB simple family (application)

EP 03090310 A 20030923; CN 03125499 A 20030924; JP 2003313809 A 20030905; KR 20030065588 A 20030922; US 66846103 A 20030923