EP 1404722 A1 20040407 - CONTINUOUS PROCESSING APPARATUS BY PLASMA POLYMERIZATION WITH VERTICAL CHAMBER
Title (en)
CONTINUOUS PROCESSING APPARATUS BY PLASMA POLYMERIZATION WITH VERTICAL CHAMBER
Title (de)
KONTINUIERLICHE PROZESSAPPARATUR DURCH PLASMAPOLYMERISATION MIT VERTIKALER KAMMER
Title (fr)
DISPOSITIF DE TRAITEMENT CONTINU PAR POLYMERISATION PLASMA COMPORTANT UNE CHAMBRE VERTICALE
Publication
Application
Priority
KR 0100907 W 20010530
Abstract (en)
[origin: WO02096956A1] A continuous processing apparatus by plasma polymerization having a plurality of chambers to perform a surface processing by plasma polymerization on the surface of a substance being moved into a chamber, includes at least one vertical chamber in which a substance is vertically moved and at least one electrode is included therein. Since the vertical chamber can be possibly formed solely or by plural ones, or can be formed along with the horizontal chamber, various forms of plasma polymerization processing system can be constructed. In addition, the plurality of chambers can be utilized for various functions and use such as the polymerization chamber, the post-processing chamber and pre-processing chamber according to purposes of surface processing.
IPC 1-7
IPC 8 full level
H05H 1/46 (2006.01); B01J 19/08 (2006.01); B05D 7/24 (2006.01); B29C 59/14 (2006.01); C08F 2/52 (2006.01); C23C 14/12 (2006.01); C23C 16/50 (2006.01)
CPC (source: EP)
B05D 1/62 (2013.01); B29C 59/14 (2013.01); H01J 37/3277 (2013.01); B05D 2252/02 (2013.01); H01J 2237/3382 (2013.01)
Citation (search report)
See references of WO 02096956A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
WO 02096956 A1 20021205; CN 1223613 C 20051019; CN 1444605 A 20030924; EP 1404722 A1 20040407; JP 2004520493 A 20040708
DOCDB simple family (application)
KR 0100907 W 20010530; CN 01813566 A 20010530; EP 01938762 A 20010530; JP 2003500135 A 20010530