EP 1407220 A1 20040414 - INTERFEROMETER SYSTEM
Title (en)
INTERFEROMETER SYSTEM
Title (de)
INTERFEROMETERSYSTEM
Title (fr)
SYSTEME D'INTERFEROMETRE
Publication
Application
Priority
- US 0218983 W 20020618
- US 88329601 A 20010619
- US 93408101 A 20010822
Abstract (en)
[origin: WO02103285A1] An interferometric measurement system capable of measuring tilt of a reflecting surface (26X, 26Y) with respect to a vertical axis (Z). The system preferably includes four laser beams (L1, L2, L3, L4) spaced at predetermined distances to measure distances between the measurement system and four locations on the reflecting surface. A controller (40) is also provided for receiving inputs from the measuring laser beams to mathematically determine a tilt of the location being measured.
IPC 1-7
IPC 8 full level
G01B 11/26 (2006.01); G01B 11/00 (2006.01); G03F 7/20 (2006.01)
CPC (source: EP)
G01B 11/002 (2013.01); G03F 7/70691 (2013.01)
Citation (search report)
See references of WO 02103285A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
WO 02103285 A1 20021227; EP 1407220 A1 20040414; JP 2004530888 A 20041007
DOCDB simple family (application)
US 0218983 W 20020618; EP 02747900 A 20020618; JP 2003505558 A 20020618