EP 1410427 A1 20040421 - EPITAXIAL SIO X? BARRIER/INSULATION LAYER----------------------
Title (en)
EPITAXIAL SIO X? BARRIER/INSULATION LAYER----------------------
Title (de)
EPITAXIAL-SIO-X--BARRIERE-/-ISOLATIONSSCHICHT
Title (fr)
COUCHE BARRIERE OU ISOLANTE EPITAXIALE EN SIO X?
Publication
Application
Priority
US 0140970 W 20010614
IPC 1-7
H01L 21/20; H01L 21/36; H01L 21/339; H01L 21/31; H01L 21/469
IPC 8 full level
H01L 29/68 (2006.01); H01L 21/02 (2006.01); H01L 21/20 (2006.01); H01L 21/31 (2006.01); H01L 21/316 (2006.01); H01L 21/336 (2006.01); H01L 21/339 (2006.01); H01L 21/36 (2006.01); H01L 21/469 (2006.01); H01L 21/76 (2006.01); H01L 27/00 (2006.01); H01L 27/12 (2006.01); H01L 29/06 (2006.01); H01L 29/78 (2006.01); H01L 29/786 (2006.01)
CPC (source: EP)
B82Y 10/00 (2013.01); H01L 21/02164 (2013.01); H01L 21/022 (2013.01); H01L 21/02238 (2013.01); H01L 21/02255 (2013.01); H01L 21/02263 (2013.01); H01L 21/02293 (2013.01); H01L 21/02337 (2013.01); H01L 29/7613 (2013.01)
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
EP 1410427 A1 20040421; EP 1410427 A4 20080423; JP 2004535062 A 20041118
DOCDB simple family (application)
EP 01944705 A 20010614; JP 2003505987 A 20010614