Global Patent Index - EP 1410427 A4

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EP 1410427 A4 20080423 - EPITAXIAL SIO X? BARRIER/INSULATION LAYER----------------------

Title (en)

EPITAXIAL SIO X? BARRIER/INSULATION LAYER----------------------

Title (de)

EPITAXIAL-SIO-X--BARRIERE-/-ISOLATIONSSCHICHT

Title (fr)

COUCHE BARRIERE OU ISOLANTE EPITAXIALE EN SIO X?

Publication

EP 1410427 A4 20080423 (EN)

Application

EP 01944705 A 20010614

Priority

US 0140970 W 20010614

IPC 1-7

H01L 21/20; H01L 21/36; H01L 21/339; H01L 21/31; H01L 21/469

IPC 8 full level

H01L 29/68 (2006.01); H01L 21/02 (2006.01); H01L 21/20 (2006.01); H01L 21/31 (2006.01); H01L 21/316 (2006.01); H01L 21/336 (2006.01); H01L 21/339 (2006.01); H01L 21/36 (2006.01); H01L 21/469 (2006.01); H01L 21/76 (2006.01); H01L 27/00 (2006.01); H01L 27/12 (2006.01); H01L 29/06 (2006.01); H01L 29/78 (2006.01); H01L 29/786 (2006.01)

CPC (source: EP)

B82Y 10/00 (2013.01); H01L 21/02164 (2013.01); H01L 21/022 (2013.01); H01L 21/02238 (2013.01); H01L 21/02255 (2013.01); H01L 21/02263 (2013.01); H01L 21/02293 (2013.01); H01L 21/02337 (2013.01); H01L 29/7613 (2013.01)

Citation (search report)

[X] TORU TATSUMI ET AL: "SI/SIOX/SI HOLE-BARRIER FABRICATION FOR BIPOLAR TRANSISTORS USING MOLECULAR BEAM DEPOSITION", THIN SOLID FILMS, ELSEVIER-SEQUOIA S.A. LAUSANNE, CH, vol. 184, no. 1, January 1990 (1990-01-01), pages 229 - 235, XP000132992, ISSN: 0040-6090
[X] TSU R: "SI BASED GREEN ELD: SI-OXYGEN SUPERLATTICE", PHYSICA STATUS SOLIDI (A). APPLIED RESEARCH, BERLIN, DE, vol. 180, no. 1, 5 March 2000 (2000-03-05), pages 333 - 338, XP008057127, ISSN: 0031-8965
[X] TSU R: "NEW TYPE OF SUPERLATTICE: AN EPITAXIAL SEMICONDUCTOR-ATOMIC SUPERLATTICE, SAS", MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS, MATERIALS RESEARCH SOCIETY, PITTSBURG, PA, US, vol. 592, 29 November 2000 (2000-11-29), pages 351 - 361, XP008057103, ISSN: 0272-9172
See references of WO 02103767A1

Designated contracting state (EPC)

AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

DOCDB simple family (publication)

EP 1410427 A1 20040421; EP 1410427 A4 20080423; JP 2004535062 A 20041118

DOCDB simple family (application)

EP 01944705 A 20010614; JP 2003505987 A 20010614