Global Patent Index - EP 1412728 A1

EP 1412728 A1 20040428 - APPARATUS FOR PARALLEL DETECTION OF THE BEHAVIOUR OF MECHANICAL MICRO-OSCILLATORS

Title (en)

APPARATUS FOR PARALLEL DETECTION OF THE BEHAVIOUR OF MECHANICAL MICRO-OSCILLATORS

Title (de)

VORRICHTUNG ZUR PARALLELEN DETEKTION DES VERHALTENS MECHANISCHER MIKROOSZILLATOREN

Title (fr)

APPAREIL DE DETECTION EN PARALLELE DU COMPORTEMENT DE MICROOSCILLATEURS MECANIQUES

Publication

EP 1412728 A1 20040428 (FR)

Application

EP 01992882 A 20011105

Priority

  • FR 0103409 W 20011105
  • FR 0014215 A 20001106

Abstract (en)

[origin: WO0237090A1] The invention concerns an apparatus for parallel detection of the behaviour of mechanical micro-oscillators interacting with the sample (21). The amplitude and the phase of resonance of micro-oscillators (12) are measured with optical means. The invention is characterised in that a source (1) is active during a fraction 1/n of the period (n being an integer) and of variable phase p/n of the period (p being an integer). Interferences are produced between light beams generated by reflection of incident light beams (7) and (8) on the micro-oscillators (12). Periodically the micro-oscillators (12) are displaced by means. The value of the parameter p (p being an integer) is varied and N elementary measurements are integrated to obtain a measurement representing each of the values of p. The phase and amplitude of each micro-oscillator (12) are calculated on the basis of the representative data obtained for each value of p and this for a large number of accumulations. The invention is applicable in the field of nanotechnologies.

IPC 1-7

G01N 27/00; G01B 7/34; G02B 21/00

IPC 8 full level

G01B 11/00 (2006.01); G01N 27/00 (2006.01); G01Q 20/02 (2010.01); G01Q 60/24 (2010.01); G02B 21/00 (2006.01); G02B 27/28 (2006.01)

CPC (source: EP US)

G01N 29/036 (2013.01 - EP US); G02B 21/00 (2013.01 - EP US); B82Y 35/00 (2013.01 - EP US); G01N 2291/0256 (2013.01 - EP US)

Citation (search report)

See references of WO 0237090A1

Citation (examination)

Designated contracting state (EPC)

AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

DOCDB simple family (publication)

WO 0237090 A1 20020510; AU 2374202 A 20020515; CA 2428218 A1 20020510; CA 2428218 C 20100126; EP 1412728 A1 20040428; FR 2816407 A1 20020510; FR 2816407 B1 20030328; JP 2004513341 A 20040430; JP 3971305 B2 20070905; US 2004052687 A1 20040318; US 7173714 B2 20070206

DOCDB simple family (application)

FR 0103409 W 20011105; AU 2374202 A 20011105; CA 2428218 A 20011105; EP 01992882 A 20011105; FR 0014215 A 20001106; JP 2002539795 A 20011105; US 41598403 A 20031016