EP 1412796 A1 20040428 - ELECTRON MICROSCOPE AND SPECTROSCOPY SYSTEM
Title (en)
ELECTRON MICROSCOPE AND SPECTROSCOPY SYSTEM
Title (de)
ELEKTRONENMIKROSKOP UND SPEKTROSKOPISCHES SYSTEM
Title (fr)
MICROSCOPE ELECTRONIQUE ET SYSTEME DE SPECTROSCOPIE
Publication
Application
Priority
- GB 0203599 W 20020805
- GB 0118981 A 20010803
Abstract (en)
[origin: WO03014794A1] An electron microscope (10) is adapted to enable spectroscopic analysis of a sample (16). A parabolic mirror (18) has a central aperture (20) through which the electron beam can pass. The mirror (18) focuses laser illumination from a transverse optical path (24) onto the sample, and collects Raman and/or other scattered light, passing it back to an optical system (30). The mirror (18) is retractable (within the vacuum of the electron microscope) by a sliding arm assembly (22). An adjustable kinematic mount (44) defines the inserted position of the parabolic mirror (18). A second parabolic mirror (104) is provided to direct the scattered or generated light towards an optical analyser. The parabolic mirrors are positioned in an aberration cancelling orientation and such that they compensate for inaccuracies in the position of the sliding arm assembly (22).
IPC 1-7
IPC 8 full level
G01N 21/65 (2006.01); G01J 3/02 (2006.01); G01N 21/62 (2006.01); G01N 21/64 (2006.01); H01J 37/22 (2006.01); H01J 37/256 (2006.01)
CPC (source: EP)
G01J 3/02 (2013.01); G01J 3/0202 (2013.01); G01J 3/0208 (2013.01); G01J 3/0216 (2013.01); G01J 3/0243 (2013.01); H01J 37/228 (2013.01); H01J 37/256 (2013.01); H01J 2237/2445 (2013.01); H01J 2237/2808 (2013.01)
Citation (search report)
See references of WO 03014794A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR
DOCDB simple family (publication)
WO 03014794 A1 20030220; EP 1412796 A1 20040428; GB 0118981 D0 20010926; JP 2004538470 A 20041224; JP 2009031314 A 20090212; JP 5095587 B2 20121212
DOCDB simple family (application)
GB 0203599 W 20020805; EP 02753135 A 20020805; GB 0118981 A 20010803; JP 2003519668 A 20020805; JP 2008291333 A 20081113