EP 1412967 A1 20040428 - METHOD FOR THE PRODUCTION OF A LENS
Title (en)
METHOD FOR THE PRODUCTION OF A LENS
Title (de)
VERFAHREN ZUR HERSTELLUNG EINER LINSE
Title (fr)
PROCEDE DE FABRICATION D'UNE LENTILLE
Publication
Application
Priority
- DE 0202714 W 20020724
- DE 10135872 A 20010724
Abstract (en)
[origin: WO03012829A1] The production of aspherical lenses on a semiconductor material is disclosed, whereby the structure of a photo-resist segment is transferred to a semiconductor substrate therebelow, by means of a reactive ion-etching process. A gas component which etches the photoresist and a further gas component which etches the semiconductor substrate therebelow are used. The ratio of the gas streams is altered during the etching process. The result is an aspherical lens, the measured cross-sectional profile (12) of which has only minor deviations (14) from an ideal curve (13).
IPC 1-7
IPC 8 full level
G02B 3/04 (2006.01)
CPC (source: EP US)
G02B 3/04 (2013.01 - EP US)
Citation (search report)
See references of WO 03012829A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR
DOCDB simple family (publication)
WO 03012829 A1 20030213; DE 10135872 A1 20030227; EP 1412967 A1 20040428; US 2004251233 A1 20041216
DOCDB simple family (application)
DE 0202714 W 20020724; DE 10135872 A 20010724; EP 02754425 A 20020724; US 48459904 A 20040813