Global Patent Index - EP 1412972 A2

EP 1412972 A2 20040428 - METHOD FOR REDUCING SURFACE RUGOSITY

Title (en)

METHOD FOR REDUCING SURFACE RUGOSITY

Title (de)

VERFAHREN ZUM VERRINGERN DER OBERFLÄCHENRUGOSITÄT

Title (fr)

PROCEDE DE DIMINUTION DE RUGOSITE DE SURFACE

Publication

EP 1412972 A2 20040428 (FR)

Application

EP 02782466 A 20020704

Priority

  • FR 0202341 W 20020704
  • FR 0108859 A 20010704

Abstract (en)

[origin: FR2827078A1] The invention relates to a method for reducing the rugosity of the free surface of a slice of semiconductor material. Said method comprises an annealing step in order to smooth said free surface. The invention is characterized in that the method for reducing free surface rugosity comprising a single smoothing annealing step which is carried out in the form of rapid thermal annealing in an atmosphere which is exclusively comprised of pure argon. The invention also relates to a structure produced by said method.

IPC 1-7

H01L 21/324; H01L 21/306; H01L 21/762; H01L 21/302; H01L 21/316

IPC 8 full level

H01L 21/02 (2006.01); H01L 21/26 (2006.01); H01L 21/302 (2006.01); H01L 21/324 (2006.01); H01L 21/762 (2006.01); H01L 27/12 (2006.01)

CPC (source: EP KR US)

H01L 21/302 (2013.01 - EP US); H01L 21/324 (2013.01 - EP KR US); H01L 21/3247 (2013.01 - EP US); H01L 21/76254 (2013.01 - EP US)

Citation (search report)

See references of WO 03005434A2

Citation (examination)

  • AIR LIQUIDE: "Bulk Liquid Pure Argon", Retrieved from the Internet <URL:http://www.uk.airliquide.com/en/products-and-services/bulk-gases/bulk-liquid-pure-argon.html>
  • CFC STARTEC LLC: "Argon", Retrieved from the Internet <URL:http://www.c-f-c.com/specgas_products/argon.htm>

DOCDB simple family (publication)

FR 2827078 A1 20030110; FR 2827078 B1 20050204; AU 2002333957 A1 20030121; CN 1321443 C 20070613; CN 1524289 A 20040825; EP 1412972 A2 20040428; JP 2004538627 A 20041224; KR 100784581 B1 20071210; KR 20040013106 A 20040211; US 2004171257 A1 20040902; US 6962858 B2 20051108; WO 03005434 A2 20030116; WO 03005434 A3 20031106

DOCDB simple family (application)

FR 0108859 A 20010704; AU 2002333957 A 20020704; CN 02813551 A 20020704; EP 02782466 A 20020704; FR 0202341 W 20020704; JP 2003511301 A 20020704; KR 20047000100 A 20020704; US 75044303 A 20031230