Global Patent Index - EP 1420312 A3

EP 1420312 A3 20060412 - Method, apparatus, data carrier and computer program module for monitoring and regulating a production process

Title (en)

Method, apparatus, data carrier and computer program module for monitoring and regulating a production process

Title (de)

Verfahren, Vorrichtung, computerlesbarer Speicher und Computerprogramm-Element zum rechnergestützten Überwachen und Regeln eines Herstellungsprozesses

Title (fr)

Procédé, dispositif, support de données et module de logiciel de surveillance et regulation d'un processus de fabrication

Publication

EP 1420312 A3 20060412 (DE)

Application

EP 03026036 A 20031112

Priority

DE 10252605 A 20021112

Abstract (en)

[origin: EP1420312A2] Run-to-run method for computer based monitoring and control of a semiconductor wafer manufacturing process. According to the method, at least one wafer is marked for future statistical process control (SPC) measurements after being deterministically selected. The wafers of the production process are regulated according to the results of the SPC measurements, with at least one wafer selected for the run-to-run method as well as one for the in-line SPC method according to the deterministic selection criterion. The invention also relates to a corresponding device, computer program element and computer readable storage medium.

IPC 8 full level

G05B 19/418 (2006.01); H01L 21/66 (2006.01)

CPC (source: EP US)

G05B 19/41875 (2013.01 - EP US); G05B 2219/32182 (2013.01 - EP US); G05B 2219/45031 (2013.01 - EP US); H01L 22/20 (2013.01 - EP US); Y02P 90/02 (2015.11 - EP US)

Citation (search report)

Designated contracting state (EPC)

AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR

DOCDB simple family (publication)

EP 1420312 A2 20040519; EP 1420312 A3 20060412; DE 10252605 A1 20040624; US 2004225396 A1 20041111; US 6909933 B2 20050621

DOCDB simple family (application)

EP 03026036 A 20031112; DE 10252605 A 20021112; US 70661503 A 20031112