EP 1425573 A1 20040609 - CHROMIUM/TITANIUM OXIDE SEMICONDUCTOR GAS SENSOR AND METHOD FOR PRODUCTION THEREOF
Title (en)
CHROMIUM/TITANIUM OXIDE SEMICONDUCTOR GAS SENSOR AND METHOD FOR PRODUCTION THEREOF
Title (de)
METALLOXID-HALBLEITERGASSENSOR UND VERFAHREN ZU SEINER HERSTELLUNG
Title (fr)
DETECTEUR DE GAZ CHROME-TITANE-OXYDE-SEMI-CONDUCTEUR ET PROCEDE PERMETTANT DE LE PRODUIRE
Publication
Application
Priority
- DE 10144900 A 20010912
- EP 0209763 W 20020902
Abstract (en)
[origin: WO03023387A1] A metal oxide semiconductor gas sensor and a method for production thereof are disclosed, where the sensor comprises a sensor-active metal oxide thin layer applied to a substrate, in contact with at least one electrode. The sensor-active metal oxide thin layer is embodied as a chromium/titanium oxide (CTO) layer with a layer thickness of 10 nm to 1 mu m. The chromium and titanium layers are applied over each other using thin layer technology and subsequently tempered.
IPC 1-7
IPC 8 full level
G01N 27/12 (2006.01)
CPC (source: EP US)
G01N 27/125 (2013.01 - EP US)
Citation (search report)
See references of WO 03023387A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR
DOCDB simple family (publication)
WO 03023387 A1 20030320; DE 10144900 A1 20030410; DE 10144900 B4 20050804; EP 1425573 A1 20040609; US 2004231974 A1 20041125; US 7406856 B2 20080805
DOCDB simple family (application)
EP 0209763 W 20020902; DE 10144900 A 20010912; EP 02779286 A 20020902; US 48957404 A 20040420