EP 1426992 A3 20051130 - Electrostatic mems switch
Title (en)
Electrostatic mems switch
Title (de)
Mikroelektromechanische elektrostatische Schalter
Title (fr)
Interrupteur électrostatique et microeléctromécanique
Publication
Application
Priority
JP 2002354041 A 20021205
Abstract (en)
[origin: EP1426992A2] A plurality of fixed contacts and signal lines are provided on a fixed substrate. A movable contact which is closed or opened with the fixed contacts is provided on a movable substrate opposed to the fixed substrate. A film thickness of the fixed contacts is made to be smaller than that of the signal lines so that the movable contact is set in a concave portion constituted by the fixed contacts when the fixed contacts, and the movable contact are closed and the signal lines are linearly connected. <IMAGE>
IPC 1-7
IPC 8 full level
H01H 59/00 (2006.01); H01P 1/12 (2006.01)
CPC (source: EP)
H01H 59/0009 (2013.01); H01P 1/127 (2013.01); H01H 2001/0084 (2013.01); H01H 2059/0054 (2013.01)
Citation (search report)
- [XY] WO 0044012 A1 20000727 - GFD GES FUER DIAMANTPRODUKTE M [DE], et al
- [Y] US 2002163408 A1 20021107 - FUJII MITSURU [JP], et al
- [Y] WO 02079076 A1 20021010 - JDS UNIPHASE CORP [US]
- [Y] PARK J Y ET AL: "Fully integrated micromachined capacitive switches for RF applications", MICROWAVE SYMPOSIUM DIGEST. 2000 IEEE MTT-S INTERNATIONAL BOSTON, MA, USA 11-16 JUNE 2000, PISCATAWAY, NJ, USA,IEEE, US, vol. 1, 11 June 2000 (2000-06-11), pages 283 - 286, XP010505974, ISBN: 0-7803-5687-X
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
DOCDB simple family (application)
EP 03104514 A 20031203