EP 1434898 A1 20040707 - METHODS FOR THE PRODUCTION OF COMPONENTS AND ULTRA HIGH VACUUM CVD REACTOR
Title (en)
METHODS FOR THE PRODUCTION OF COMPONENTS AND ULTRA HIGH VACUUM CVD REACTOR
Title (de)
VERFAHREN ZUR HERSTELLUNG VON BAUELEMENTEN UND ULTRAHOCHVAKUUM-CVD-REAKTOR
Title (fr)
PROCEDE DE FABRICATION DE COMPOSANTS ET REACTEUR DE DEPOT CHIMIQUE EN PHASE VAPEUR A VIDE POUSSE
Publication
Application
Priority
- CH 0200467 W 20020828
- CH 18892001 A 20011012
Abstract (en)
[origin: WO03031680A1] In order to commercially treat components by CVD, whilst retaining ultra high vacuum residual gas conditions, the components are introduced into a CVD reactor (1), which meets the necessary requirements, in the form of a batch, from a vacuum transport chamber (13) which connects said UHV-CVD reactor (1) with a pre-arranged serial treatment chamber (17). The treatment chamber (17) can be a lock chamber, a further vacuum transport chamber, a coating chamber, a cleaning chamber, an etching chamber, a heating chamber, a buffer chamber or an implantation chamber.
IPC 1-7
IPC 8 full level
C23C 16/44 (2006.01); C23C 16/458 (2006.01); C23C 16/54 (2006.01); C30B 25/08 (2006.01); H01L 21/205 (2006.01)
CPC (source: EP)
C23C 16/4586 (2013.01); C23C 16/54 (2013.01); C30B 25/08 (2013.01)
Citation (search report)
See references of WO 03031680A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR
DOCDB simple family (publication)
WO 03031680 A1 20030417; CN 1568379 A 20050119; EP 1434898 A1 20040707; JP 2005505146 A 20050217; TW 578215 B 20040301
DOCDB simple family (application)
CH 0200467 W 20020828; CN 02820218 A 20020828; EP 02754096 A 20020828; JP 2003534648 A 20020828; TW 91123272 A 20021009