EP 1434977 A1 20040707 - SCATTEROMETRIC MEASURING ARRAY AND MEASURING METHOD
Title (en)
SCATTEROMETRIC MEASURING ARRAY AND MEASURING METHOD
Title (de)
SCATTEROMETRISCHE MESSANORDNUNG UND MESSVERFAHREN
Title (fr)
DISPOSITIF ET PROCEDE DE MESURE DIFFUSIOMETRIQUE
Publication
Application
Priority
- DE 10146945 A 20010924
- EP 0210476 W 20020918
Abstract (en)
[origin: WO03029770A1] The invention relates to a measuring array having an optical device into which a radiation beam (10) departing and diverging from a sample is injected for measurement and a detector (13) arranged downstream of said optical device, said detector having a plurality of detector pixels which are arranged on a plane and can be evaluated separately from one another, wherein the optical device (11) spectrally splits the diverging radiation beam (10) in a first direction crosswise to the direction of propagation of the radiation beam (10) and directs it towards the detector (13). The optical device parallelizes the radiation beam before it strikes the detector (13) in a second direction crosswise to the direction of propagation in such a manner that adjacent rays in the second direction of the radiation beam striking the detector (13) are parallel relative to one another.
IPC 1-7
IPC 8 full level
G01J 3/36 (2006.01); G01J 3/28 (2006.01); G01J 4/00 (2006.01); G01N 21/21 (2006.01); G01N 21/27 (2006.01); G01N 21/47 (2006.01)
CPC (source: EP US)
G01J 3/28 (2013.01 - EP US); G01J 4/00 (2013.01 - EP US); G01N 21/211 (2013.01 - EP US); G01N 21/47 (2013.01 - EP US)
Citation (search report)
See references of WO 03029770A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR
DOCDB simple family (publication)
WO 03029770 A1 20030410; DE 10146945 A1 20030410; EP 1434977 A1 20040707; JP 2005504314 A 20050210; US 2004196460 A1 20041007
DOCDB simple family (application)
EP 0210476 W 20020918; DE 10146945 A 20010924; EP 02785122 A 20020918; JP 2003532935 A 20020918; US 47225304 A 20040412