Global Patent Index - EP 1434977 A1

EP 1434977 A1 20040707 - SCATTEROMETRIC MEASURING ARRAY AND MEASURING METHOD

Title (en)

SCATTEROMETRIC MEASURING ARRAY AND MEASURING METHOD

Title (de)

SCATTEROMETRISCHE MESSANORDNUNG UND MESSVERFAHREN

Title (fr)

DISPOSITIF ET PROCEDE DE MESURE DIFFUSIOMETRIQUE

Publication

EP 1434977 A1 20040707 (DE)

Application

EP 02785122 A 20020918

Priority

  • DE 10146945 A 20010924
  • EP 0210476 W 20020918

Abstract (en)

[origin: WO03029770A1] The invention relates to a measuring array having an optical device into which a radiation beam (10) departing and diverging from a sample is injected for measurement and a detector (13) arranged downstream of said optical device, said detector having a plurality of detector pixels which are arranged on a plane and can be evaluated separately from one another, wherein the optical device (11) spectrally splits the diverging radiation beam (10) in a first direction crosswise to the direction of propagation of the radiation beam (10) and directs it towards the detector (13). The optical device parallelizes the radiation beam before it strikes the detector (13) in a second direction crosswise to the direction of propagation in such a manner that adjacent rays in the second direction of the radiation beam striking the detector (13) are parallel relative to one another.

IPC 1-7

G01J 4/00; G01N 21/21

IPC 8 full level

G01J 3/36 (2006.01); G01J 3/28 (2006.01); G01J 4/00 (2006.01); G01N 21/21 (2006.01); G01N 21/27 (2006.01); G01N 21/47 (2006.01)

CPC (source: EP US)

G01J 3/28 (2013.01 - EP US); G01J 4/00 (2013.01 - EP US); G01N 21/211 (2013.01 - EP US); G01N 21/47 (2013.01 - EP US)

Citation (search report)

See references of WO 03029770A1

Designated contracting state (EPC)

AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR

DOCDB simple family (publication)

WO 03029770 A1 20030410; DE 10146945 A1 20030410; EP 1434977 A1 20040707; JP 2005504314 A 20050210; US 2004196460 A1 20041007

DOCDB simple family (application)

EP 0210476 W 20020918; DE 10146945 A 20010924; EP 02785122 A 20020918; JP 2003532935 A 20020918; US 47225304 A 20040412