EP 1439935 A2 20040728 - ELECTROCHEMICAL MECHANICAL PROCESSING WITH ADVANCIBLE SWEEPER
Title (en)
ELECTROCHEMICAL MECHANICAL PROCESSING WITH ADVANCIBLE SWEEPER
Title (de)
ELEKTROCHEMISCH-MECHANISCHE VERARBEITUNG MIT VORRÜCKBARER BÜRSTE
Title (fr)
TRAITEMENT ELECTROCHIMIQUE MECANIQUE AVEC DISPOSITIF DE BALAYAGE AVANCANT
Publication
Application
Priority
- US 0235398 W 20021104
- US 35021401 P 20011102
Abstract (en)
[origin: WO03041126A2] The present invention provides an apparatus for electrochemical mechanical processing of a surface of a workpiece by utilizing a process solution. The apparatus of the present invention includes an electrode touching the process solution, a belt workpiece surface influencing device extended between a supply spool and a receiving spool. During the process, the surface of the workpiece is placed in proximity of the workpiece surface influencing device and the process solution is flowed through the process section and onto the surface while a potential difference is applied between the electrode and the surface of the workpiece.
IPC 1-7
IPC 8 full level
B24B 7/22 (2006.01); B24B 21/04 (2006.01); B24B 37/04 (2012.01); C25D 5/22 (2006.01); C25D 7/12 (2006.01); C25F 3/30 (2006.01); H01L 21/288 (2006.01); H01L 21/304 (2006.01); H01L 21/768 (2006.01)
CPC (source: EP KR US)
B24B 7/228 (2013.01 - EP KR); B24B 21/04 (2013.01 - EP KR US); B24B 37/04 (2013.01 - EP KR); C25D 5/22 (2013.01 - EP KR US); H01L 21/2885 (2013.01 - EP KR); H01L 21/67092 (2013.01 - KR); H01L 21/7684 (2013.01 - EP KR); H01L 21/76877 (2013.01 - EP KR)
Citation (search report)
See references of WO 03041126A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR
DOCDB simple family (publication)
WO 03041126 A2 20030515; WO 03041126 A3 20031106; AU 2002363479 A1 20030519; CN 1646263 A 20050727; EP 1439935 A2 20040728; JP 2005509092 A 20050407; KR 20040064699 A 20040719; TW 200300463 A 20030601; TW 593787 B 20040621
DOCDB simple family (application)
US 0235398 W 20021104; AU 2002363479 A 20021104; CN 02826490 A 20021104; EP 02802846 A 20021104; JP 2003543071 A 20021104; KR 20047006513 A 20021104; TW 91132514 A 20021104