EP 1442329 A2 20040804 - OPTICAL ELEMENT WITH AN OPTICAL AXIS
Title (en)
OPTICAL ELEMENT WITH AN OPTICAL AXIS
Title (de)
OPTISCHES ELEMENT MIT EINER OPTISCHEN ACHSE
Title (fr)
ELEMENT OPTIQUE PRESENTANT UN AXE OPTIQUE
Publication
Application
Priority
- DE 10151919 A 20011020
- EP 0211656 W 20021018
Abstract (en)
[origin: WO03036359A2] The invention concerns an optical element (1) with an optical axis (3), designed in particular for an exposure lens used in semiconductor lithography. Said optical element comprises at least an extension (2, 2') in the direction of the optical axis (3). A device (11) enables to induce a two-wave or multiple wave deformation in said optical element (1). At least a system (12) mounted in the extension zone (2, 2') is designed to apply a force in said extension (2, 2').
IPC 1-7
IPC 8 full level
G02B 5/10 (2006.01); G02B 7/00 (2006.01); G02B 7/198 (2006.01); G03F 7/20 (2006.01)
CPC (source: EP US)
G02B 7/005 (2013.01 - EP US); G03F 7/70258 (2013.01 - EP US); G03F 7/70266 (2013.01 - EP US); G03F 7/70825 (2013.01 - EP US)
Citation (search report)
See references of WO 03036359A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR
DOCDB simple family (publication)
WO 03036359 A2 20030501; WO 03036359 A3 20031009; DE 10151919 A1 20030515; DE 10151919 B4 20070201; EP 1442329 A2 20040804; JP 2005506574 A 20050303; US 2004257683 A1 20041223; US 7295331 B2 20071113
DOCDB simple family (application)
EP 0211656 W 20021018; DE 10151919 A 20011020; EP 02782948 A 20021018; JP 2003538798 A 20021018; US 48903004 A 20040415