EP 1442330 A1 20040804 - TILTING MIRROR
Title (en)
TILTING MIRROR
Title (de)
KIPPSPIEGEL
Title (fr)
MIROIR INCLINABLE
Publication
Application
Priority
- DE 10155261 A 20011109
- EP 0211773 W 20021022
Abstract (en)
[origin: WO03040796A1] A tilting mirror, in particular as mirror facet (2) for a facet mirror (1) comprising a plurality of these tilting mirrors (2), is provided with a mirror surface (5) and a bearing device. The mirror surface (5) is constructed as the surface in a recess (4) in a spherical member (3), the spherical member (3) being mounted in the bearing device.
IPC 1-7
IPC 8 full level
G02B 5/10 (2006.01); G02B 5/09 (2006.01); G02B 7/182 (2006.01); G02B 7/198 (2006.01); G02B 26/08 (2006.01); G02B 27/00 (2006.01); G03F 7/20 (2006.01); H01L 21/027 (2006.01)
CPC (source: EP)
G02B 5/09 (2013.01); G02B 7/1821 (2013.01); G02B 7/1824 (2013.01); G02B 26/0833 (2013.01); G03F 7/70075 (2013.01); G03F 7/70141 (2013.01); G03F 7/70175 (2013.01); G03F 7/702 (2013.01)
Citation (search report)
See references of WO 03040796A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR
DOCDB simple family (publication)
WO 03040796 A1 20030515; EP 1442330 A1 20040804; JP 2005508520 A 20050331
DOCDB simple family (application)
EP 0211773 W 20021022; EP 02785265 A 20021022; JP 2003542376 A 20021022