EP 1444720 A2 20040811 - METHOD AND DEVICE FOR DRYING FLAT OBJECTS, IN PARTICULAR GALLIUM OR SILICON WAFERS OR OTHER LIKE SUBSTRATES
Title (en)
METHOD AND DEVICE FOR DRYING FLAT OBJECTS, IN PARTICULAR GALLIUM OR SILICON WAFERS OR OTHER LIKE SUBSTRATES
Title (de)
VERFAHREN UND VORRICHTUNG ZUM TROCKNEN VON HALBLEITERSCHEIBEN
Title (fr)
PROCEDE ET DISPOSITIF POUR SECHER DES OBJETS PLATS, NOTAMMENT DES TRANCHES DE GALLIUM OU DE SILICIUM OU BIEN DES SUBSTRATS ANALOGUES
Publication
Application
Priority
- DE 10153225 A 20011031
- EP 0211986 W 20021026
Abstract (en)
[origin: WO03038866A2] The invention concerns a method for drying flat objects, such as data storage media in the form of wafers or their half-finished products, and in particular gallium or silicon slices or like substrates, in a treatment chamber (30, 61) capable of being locked, wherein is housed a support (12) receiving the substrate(s) (10). According to the invention, the substrates (10) are dipped in a bath (20) and displaced in a zone of spraying nozzles (50, 51, 52). The invention is characterized in that the slice(s) (10) or the like are dipped in a bath (20) consisting of a high-purity treatment liquid as separation medium (Q) and specific light water, a transverse current being generated by means of a separation medium at the bath surface (21), wherefrom the residual moisture is extracted. Additionally, the treatment liquid or separation medium (Q) is cooled at room temperature, the temperature of the slice (10) or the like is maintained at a higher level than the ambient temperature, in particular about 5 DEG C above room temperature.
IPC 1-7
IPC 8 full level
H01L 21/00 (2006.01)
CPC (source: EP US)
H01L 21/67034 (2013.01 - EP US)
Citation (search report)
See references of WO 03038866A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR
DOCDB simple family (publication)
WO 03038866 A2 20030508; WO 03038866 A3 20040108; AU 2002346886 A1 20030512; DE 10153225 A1 20030508; EP 1444720 A2 20040811; US 2005022418 A1 20050203
DOCDB simple family (application)
EP 0211986 W 20021026; AU 2002346886 A 20021026; DE 10153225 A 20011031; EP 02783015 A 20021026; US 49445404 A 20040902