EP 1447567 A3 20050615 - Vacuum pump arrangement
Title (en)
Vacuum pump arrangement
Title (de)
Vakuumpumpanordnung
Title (fr)
Unité de pompage à vide
Publication
Application
Priority
DE 10305038 A 20030207
Abstract (en)
[origin: EP1447567A2] A tempering device (20) is provided between a suction side flange (13) of a pump and a recipient connection flange (16).
IPC 1-7
IPC 8 full level
F04D 19/04 (2006.01); F04D 29/58 (2006.01); F04D 29/60 (2006.01)
CPC (source: EP US)
F04D 19/04 (2013.01 - EP US); F04D 29/584 (2013.01 - EP US); F04D 29/601 (2013.01 - EP US)
Citation (search report)
- [XA] DE 19724323 A1 19981217 - LEYBOLD VAKUUM GMBH [DE]
- [XA] EP 1231383 A1 20020814 - SEIKO INSTR INC [JP]
- [XA] EP 0819856 A1 19980121 - VARIAN SPA [IT]
- [XA] EP 0397051 A1 19901114 - TOSHIBA KK [JP], et al
- [XA] EP 0767307 A1 19970409 - CIT ALCATEL [FR]
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
EP 1447567 A2 20040818; EP 1447567 A3 20050615; EP 1447567 B1 20070919; AT E373781 T1 20071015; DE 10305038 A1 20040819; DE 502004004989 D1 20071031; JP 2004239258 A 20040826; US 2004156713 A1 20040812; US 7500821 B2 20090310
DOCDB simple family (application)
EP 04000831 A 20040116; AT 04000831 T 20040116; DE 10305038 A 20030207; DE 502004004989 T 20040116; JP 2004007842 A 20040115; US 77175304 A 20040204