EP 1449244 A2 20040825 - METHOD FOR PRODUCING A LAYER ON A SUBSTRATE
Title (en)
METHOD FOR PRODUCING A LAYER ON A SUBSTRATE
Title (de)
VERFAHREN ZUR HERSTELLUNG EINER SCHICHT AUF EINEM SUBSTRAT
Title (fr)
PROCEDE DE PRODUCTION D'UNE COUCHE SUR UN SUBSTRAT
Publication
Application
Priority
- DE 0204237 W 20021116
- DE 10157627 A 20011126
Abstract (en)
[origin: WO03046972A2] The invention relates to a method for the production of structures in the nanometer range from larger, existing structures. An elastic strain field in generated in an already structured layer and optionally in a substrate. A strain-dependent diffusion and reaction process subsequently takes place, wherein the existing structure can be reduced in a reproducible manner by means of material transport.
IPC 1-7
IPC 8 full level
H01L 21/3105 (2006.01); H01L 21/316 (2006.01)
CPC (source: EP US)
H01L 21/0223 (2013.01 - EP US); H01L 21/02255 (2013.01 - EP US); H01L 21/3105 (2013.01 - EP US); H01L 21/31662 (2016.02 - US)
Citation (search report)
See references of WO 03046972A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR
DOCDB simple family (publication)
WO 03046972 A2 20030605; WO 03046972 A3 20040115; DE 10157627 A1 20030612; EP 1449244 A2 20040825; US 2005042870 A1 20050224; US 7084075 B2 20060801
DOCDB simple family (application)
DE 0204237 W 20021116; DE 10157627 A 20011126; EP 02787365 A 20021116; US 49685004 A 20040614