Global Patent Index - EP 1454345 A1

EP 1454345 A1 20040908 - INTEGRATED SEMICONDUCTOR PRODUCT COMPRISING A METAL-INSULATOR-METAL CAPACITOR

Title (en)

INTEGRATED SEMICONDUCTOR PRODUCT COMPRISING A METAL-INSULATOR-METAL CAPACITOR

Title (de)

INTEGRIERTES HALBLEITERPRODUKT MIT METALL-ISOLATOR-METALL-KONDENSATOR

Title (fr)

PRODUIT SEMI-CONDUCTEUR INTEGRE A CONDENSATEUR METAL-ISOLANT-METAL

Publication

EP 1454345 A1 20040908 (DE)

Application

EP 02792906 A 20021205

Priority

  • DE 10161286 A 20011213
  • EP 0213804 W 20021205

Abstract (en)

[origin: WO03054934A1] To produce an integrated semiconductor product comprising an integrated metal-insulator-metal capacitor, a dielectric auxiliary layer (6) is first deposited on a first electrode (2, 3, 5). Said auxiliary layer (6) is then opened over the first electrode (15). A dielectric layer (7) is then created, onto which the stack (8, 9, 10) of metal strips for the second electrode is applied. The metal-insulator-metal capacitor is subsequently patterned using conventional etching technology. This allows the production of dielectric capacitor layers comprising freely selectable materials of any thickness. The particular advantage of the invention is that the etching of vias can be carried out in a significantly simpler manner than in prior art, as it is not necessary to etch through the remaining dielectric capacitor layer over the metal strips.

IPC 1-7

H01L 21/02; H01G 4/08; H01G 4/12; H01L 21/768; H01L 29/92

IPC 8 full level

H01L 21/02 (2006.01); H01L 21/768 (2006.01)

CPC (source: EP)

H01L 28/55 (2013.01); H01L 28/75 (2013.01); H01L 21/76838 (2013.01)

Citation (search report)

See references of WO 03054934A1

Designated contracting state (EPC)

AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SI SK TR

DOCDB simple family (publication)

WO 03054934 A1 20030703; AU 2002358618 A1 20030709; CN 100576441 C 20091230; CN 1605114 A 20050406; DE 10161286 A1 20030703; EP 1454345 A1 20040908; TW 200301963 A 20030716; US 2005012223 A1 20050120; US 7233053 B2 20070619

DOCDB simple family (application)

EP 0213804 W 20021205; AU 2002358618 A 20021205; CN 02825012 A 20021205; DE 10161286 A 20011213; EP 02792906 A 20021205; TW 91135972 A 20021212; US 86546304 A 20040610