EP 1456116 A1 20040915 - METHOD AND DEVICE FOR PRODUCING A COMPONENT WITH A MOBILE STRUCTURE
Title (en)
METHOD AND DEVICE FOR PRODUCING A COMPONENT WITH A MOBILE STRUCTURE
Title (de)
VERFAHREN UND VORRICHTUNG ZUR HERSTELLUNG EINES BAUELEMENTS MIT EINER BEWEGLICHEN STRUKTUR
Title (fr)
PROCEDE ET DISPOSITIF DE FABRICATION D'UN COMPOSANT PRESENTANT UNE STRUCTURE MOBILE
Publication
Application
Priority
- DE 10163506 A 20011221
- EP 0214193 W 20021212
Abstract (en)
[origin: WO03053844A1] The invention relates to a method for producing a component with a mobile structure (30), whereby a substrate is processed to obtain intermediate components (20) on said substrate, an intermediate component (20) presenting said mobile structure (30) and a protective structure (50, 54), which protects the mobile structure (30). The substrate is separated to obtain an isolated intermediate component (20), which presents said protective structure (50, 54). Said protective structure (50, 54) is then removed from the isolated intermediate component (20) to obtain the present component. Said invention also relates to a device for producing a component, which comprises units for executing the steps of said method.
IPC 1-7
IPC 8 full level
B81C 1/00 (2006.01); H01L 21/301 (2006.01)
CPC (source: EP US)
B81C 1/00896 (2013.01 - EP US)
Citation (search report)
See references of WO 03053844A1
Citation (examination)
- US 2001029060 A1 20011011 - FUKADA TSUYOSHI [JP], et al
- JP H07176511 A 19950714 - FUJITSU LTD
- US 5389182 A 19950214 - MIGNARDI MICHAEL A [US]
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SI SK TR
DOCDB simple family (publication)
WO 03053844 A1 20030703; DE 10163506 A1 20030710; EP 1456116 A1 20040915; US 2005026313 A1 20050203; US 7001828 B2 20060221
DOCDB simple family (application)
EP 0214193 W 20021212; DE 10163506 A 20011221; EP 02795183 A 20021212; US 87212404 A 20040618