EP 1458012 B1 20080402 - Ultraviolet light irradiating method and an apparatus using the same
Title (en)
Ultraviolet light irradiating method and an apparatus using the same
Title (de)
Verfahren und Vorrichtung zur Bestrahlung mit Ultraviolettlicht
Title (fr)
Procédé et dispositif d'irradiation de rayons ultraviolets
Publication
Application
Priority
JP 2003066561 A 20030312
Abstract (en)
[origin: EP1458012A2] An ultraviolet irradiating apparatus for emitting ultraviolet light toward a work piece. The work piece, e.g. a semiconductor wafer, is held by a ring-shaped frame through an ultraviolet sensitive adhesive tape applied to the back surface of the wafer. The apparatus includes an ultraviolet irradiating section having a regulating member disposed in a lower position of a support base. The regulating member is provided to limit a downward displacement of the wafer.
IPC 8 full level
H01L 21/00 (2006.01); H01L 21/301 (2006.01); H01L 21/68 (2006.01)
CPC (source: EP KR US)
A47G 19/186 (2013.01 - KR); H01L 21/67115 (2013.01 - EP US); H01L 21/67132 (2013.01 - EP US); A47G 2400/02 (2013.01 - KR)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
EP 1458012 A2 20040915; EP 1458012 A3 20060510; EP 1458012 B1 20080402; AT E391341 T1 20080415; CN 100361273 C 20080109; CN 1531016 A 20040922; DE 602004012789 D1 20080515; DE 602004012789 T2 20080724; JP 2004281430 A 20041007; JP 4488686 B2 20100623; KR 101011890 B1 20110201; KR 20040081012 A 20040920; TW 200425305 A 20041116; TW I312173 B 20090711; US 2004180515 A1 20040916; US 7091499 B2 20060815
DOCDB simple family (application)
EP 04003567 A 20040218; AT 04003567 T 20040218; CN 200410039904 A 20040312; DE 602004012789 T 20040218; JP 2003066561 A 20030312; KR 20040014990 A 20040305; TW 93106279 A 20040310; US 77622104 A 20040212