EP 1459134 A1 20040922 - METHOD FOR OPTIMIZING THE IMAGING CHARACTERISTICS OF AT LEAST TWO OPTICAL ELEMENTS AND PHOTOLITHOGRAPHIC PRODUCTION PROCESS
Title (en)
METHOD FOR OPTIMIZING THE IMAGING CHARACTERISTICS OF AT LEAST TWO OPTICAL ELEMENTS AND PHOTOLITHOGRAPHIC PRODUCTION PROCESS
Title (de)
VERFAHREN ZUR OPTIMIERUNG DER ABBILDUNGSEIGENSCHAFTEN VON MINDESTENS ZWEI OPTISCHEN ELEMENTEN SOWIE PHOTOLITHOGRAPHISCHES FERTIGUNGSVERFAHREN
Title (fr)
PROCEDE D'OPTIMISATION DES PROPRIETES DE REPRESENTATION D'AU MOINS DEUX ELEMENTS OPTIQUES ET PROCEDE DE PRODUCTION PHOTOLITHOGRAPHIQUE
Publication
Application
Priority
- DE 10162796 A 20011220
- EP 0211030 W 20021002
Abstract (en)
[origin: WO03054631A1] The invention relates to a method for optimizing the imaging characteristics of at least two optical elements (9, 10) wherein the relative position of the optical elements (9,10) is adjusted in order to optimize the optical imaging in relation thereto. The inventive method consists of the following steps: a polarization-dependent disturbance variable is initially determined for at least one element (9, 10). A target position of at least one movable optical element (9) is calculated from the disturbance variable determined therefor and the disturbance variables of the other optical elements. In the target position, the overall variable for all optical elements (6), comprising polarization-dependent and polarization-independent disturbance variables is minimized. The movable optical element (9) is then moved into said target position. Precise modelling of the imaging characteristics is achieved by taking into account the polarization-dependent disturbance variable, thereby creating the requisite precondition for exact optimization.
IPC 1-7
IPC 8 full level
G02B 7/00 (2006.01); G02B 5/30 (2006.01); G03F 7/20 (2006.01); H01L 21/027 (2006.01)
CPC (source: EP US)
G02B 5/3083 (2013.01 - EP US); G03F 7/70258 (2013.01 - EP US); G03F 7/70566 (2013.01 - EP US); G03F 7/70591 (2013.01 - EP US); G03F 7/70966 (2013.01 - EP US); Y10S 359/90 (2013.01 - EP US)
Citation (search report)
See references of WO 03054631A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR
DOCDB simple family (publication)
WO 03054631 A1 20030703; AU 2002366852 A1 20030709; CN 1271473 C 20060823; CN 1606715 A 20050413; DE 10162796 A1 20030703; DE 10162796 B4 20071031; EP 1459134 A1 20040922; JP 2005513794 A 20050512; US 2005013012 A1 20050120; US 2005254773 A1 20051117; US 2006146427 A1 20060706; US 6963449 B2 20051108; US 7027237 B2 20060411
DOCDB simple family (application)
EP 0211030 W 20021002; AU 2002366852 A 20021002; CN 02825556 A 20021002; DE 10162796 A 20011220; EP 02805274 A 20021002; JP 2003555281 A 20021002; US 18506605 A 20050720; US 36134506 A 20060224; US 70909804 A 20040413