EP 1459352 A1 20040922 - DEVICE FOR TREATING OBJECTS BY PLASMA DEPOSITION
Title (en)
DEVICE FOR TREATING OBJECTS BY PLASMA DEPOSITION
Title (de)
VORRICHTUNG ZUR BEHANDLUNG VON GEGENSTÄNDEN MITTELS PLASMABESCHICHTUNG
Title (fr)
DISPOSITIF POUR LE TRAITEMENT D'OBJETS PAR DEPOSITION PLASMA
Publication
Application
Priority
- CH 0200698 W 20021216
- CH 23542001 A 20011220
Abstract (en)
[origin: WO03054910A1] The invention concerns a device for treating objects by plasma deposition comprising: a sealed treatment chamber (1), under reduced pressure, provided on one of its walls (4) with a passageway (2) capable of being closed, said passageway (2) enabling to feed objects to be treated (3) between the inside and the outside of the treatment chamber (1); a transfer space (5) capable of communicating, via said passageway (2), with the treatment chamber (1), so that the objects to be treated (3) are introduced into the transfer space (5) prior to being introduced into the treatment chamber (1). Said device is characterized in that the transfer space (5): delimited by discontinuous walls (6, 7), is mobile relative to the treatment chamber (1) so as to be able to move across the passageway (2) of the treatment chamber (1).
IPC 1-7
IPC 8 full level
C23C 14/50 (2006.01); H01J 1/00 (2006.01); H01J 37/32 (2006.01)
CPC (source: EP KR US)
H01J 37/32 (2013.01 - KR); H01J 37/32743 (2013.01 - EP US); H01J 37/32788 (2013.01 - EP US)
Citation (search report)
See references of WO 03054910A1
DOCDB simple family (publication)
WO 03054910 A1 20030703; AU 2002347187 A1 20030709; BR 0215166 A 20041019; CA 2469863 A1 20030703; CN 1606793 A 20050413; EP 1459352 A1 20040922; JP 2005513269 A 20050512; KR 20040070244 A 20040806; MX PA04005881 A 20050516; RU 2004122095 A 20050327; US 2005028933 A1 20050210
DOCDB simple family (application)
CH 0200698 W 20021216; AU 2002347187 A 20021216; BR 0215166 A 20021216; CA 2469863 A 20021216; CN 02825456 A 20021216; EP 02782609 A 20021216; JP 2003555540 A 20021216; KR 20047009529 A 20021216; MX PA04005881 A 20021216; RU 2004122095 A 20021216; US 49890604 A 20040616