EP 1460679 A1 20040922 - SUSCEPTOR, GASEOUS PHASE GROWING DEVICE, DEVICE AND METHOD FOR MANUFACTURING EPITAXIAL WAFER, AND EPITAXIAL WAFER
Title (en)
SUSCEPTOR, GASEOUS PHASE GROWING DEVICE, DEVICE AND METHOD FOR MANUFACTURING EPITAXIAL WAFER, AND EPITAXIAL WAFER
Title (de)
SUSZEPTOR, GASPHASENWACHSTUMSEINRICHTUNG, EINRICHTUNG UND VERFAHREN ZUR HERSTELLUNG EINES EPITAXIALWAFERS UND EPITAXIALWAFER
Title (fr)
SUSCEPTEUR, DISPOSITIF DE CROISSANCE DE PHASE GAZEUSE, DISPOSITIF ET PROCEDE DE FABRICATION DE PLAQUETTE EPITAXIALE, ET PLAQUETTE EPITAXIALE
Publication
Application
Priority
- JP 0212368 W 20021127
- JP 2001366882 A 20011130
- JP 2002051842 A 20020227
- JP 2002092493 A 20020328
Abstract (en)
A susceptor (10) supporting a semiconductor substrate (W) in a vapor phase growth, wherein a pocket (11) is formed on an upper surface of the susceptor to arrange the semiconductor substrate (W) inside thereof. The pocket (11) has a two-stage structure having an upper stage pocket (11a) for supporting an outer peripheral edge portion of the semiconductor substrate (W) and a lower stage pocket (11b) formed on a lower stage of a center side from the upper stage pocket (11a). A hole (12) penetrated to a rear surface of the susceptor and opened in the vapor phase growth is formed in the lower stage pocket (11b). <IMAGE> <IMAGE>
IPC 1-7
IPC 8 full level
C23C 16/44 (2006.01); C23C 16/458 (2006.01); C30B 25/12 (2006.01)
CPC (source: EP KR US)
C23C 16/4405 (2013.01 - EP KR US); C23C 16/4583 (2013.01 - EP KR US); C30B 25/12 (2013.01 - EP KR US)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR
DOCDB simple family (publication)
EP 1460679 A1 20040922; CN 100338734 C 20070919; CN 1618117 A 20050518; KR 100937343 B1 20100120; KR 20040061007 A 20040706; TW 200300998 A 20030616; TW I252551 B 20060401; US 2004255843 A1 20041223; US 7270708 B2 20070918; WO 03046966 A1 20030605
DOCDB simple family (application)
EP 02783643 A 20021127; CN 02827641 A 20021127; JP 0212368 W 20021127; KR 20047008204 A 20021127; TW 91134834 A 20021129; US 49314404 A 20040420