EP 1468333 A2 20041020 - METHOD FOR CONSTRUCTING AN OPTICAL BEAM GUIDE SYSTEM IN A CONTAMINATION-FREE ATMOSPHERE AND UNIVERSAL OPTICAL MODULE FOR SAID CONSTRUCTION
Title (en)
METHOD FOR CONSTRUCTING AN OPTICAL BEAM GUIDE SYSTEM IN A CONTAMINATION-FREE ATMOSPHERE AND UNIVERSAL OPTICAL MODULE FOR SAID CONSTRUCTION
Title (de)
VERFAHREN ZUM AUFBAU EINES OPTISCHEN STRAHLFÜHRUNGSSYSTEMS
Title (fr)
PROCEDE DE CONSTRUCTION D'UN SYSTEME OPTIQUE DE FOCALISATION D'UN FAISCEAU EN ATMOSPHERE DEPOURVUE DE CONTAMINATION, ET MODULE OPTIQUE UNIVERSEL POUR CETTE CONSTRUCTION
Publication
Application
Priority
- DE 0204755 W 20021220
- DE 10203454 A 20020124
Abstract (en)
[origin: WO03062926A2] The invention relates to a method for constructing an optical beam guide system in a contamination-free atmosphere and a universal optical module for said construction. The aim of the invention is to prevent contamination of the optical imaging elements during handling, assembly and adjustment. According to the invention, the imaging element is fixated aligned relative to a first reference of a support on said support outside the contamination-free atmosphere of the beam guide system, with its optical axis protected against atmospheric influences. The support, protected against atmospheric influences, is introduced into the contamination-free atmosphere of the beam guide system together with the imaging element and is fastened on the recording element, with the first reference aligned with a second reference of a recording element, thereby aligning the optical axis of the imaging element in the beam guide system. The method and the optical module according to the invention are especially suitable for applications where optical systems have to be positioned in a beam guide system ready for instantaneous use and protected from environmental influences.
IPC 1-7
IPC 8 full level
G03F 7/20 (2006.01); H01L 21/027 (2006.01)
CPC (source: EP US)
G03F 7/70833 (2013.01 - EP US); G03F 7/70883 (2013.01 - EP US)
Citation (search report)
See references of WO 03062926A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SI SK TR
DOCDB simple family (publication)
WO 03062926 A2 20030731; WO 03062926 A3 20040122; WO 03062926 A8 20031127; AU 2002360927 A1 20030902; DE 10296357 D2 20041223; EP 1468333 A2 20041020; JP 2005516385 A 20050602; US 2005105855 A1 20050519
DOCDB simple family (application)
DE 0204755 W 20021220; AU 2002360927 A 20021220; DE 10296357 T 20021220; EP 02795052 A 20021220; JP 2003562724 A 20021220; US 50164605 A 20050103