EP 1468436 B1 20050914 - MICRO-ELECTROMECHANICAL SYSTEM AND METHOD FOR PRODUCTION THEREOF
Title (en)
MICRO-ELECTROMECHANICAL SYSTEM AND METHOD FOR PRODUCTION THEREOF
Title (de)
MIKRO-ELEKTROMECHANISCHES SYSTEM UND VERFAHREN ZU DESSEN HERSTELLUNG
Title (fr)
SYSTEME MICRO-ELECTROMECANIQUE ET PROCEDE DE FABRICATION
Publication
Application
Priority
- EP 02796487 A 20021223
- CH 0200722 W 20021223
- EP 02405334 A 20020424
- US 0201662 W 20020118
Abstract (en)
[origin: WO03060940A1] The invention relates to a micro-electromechanical system comprising a substrate (S) and at least two micro-elements (1, 2), of which a first one is a switchable bistable. The micro-elements (1, 2) comprise surfaces (3a, 4a) facing each other, generated by means of a structuring method and with a minimum separation characteristic for the structuring method. The first micro-element (1) is then switched to the other stable state (B), whereupon the separation between the surfaces (3a, 4a) facing each other is smaller than the minimal separation characteristic for the structuring method. The micro-electromechanical system can be embodied as an electrostatically operated micro-switch with improved switching. Laterally and horizontally working micro-electromechanical systems with new functionality and relays with current-free closing can be produced.
IPC 1-7
IPC 8 full level
H01H 59/00 (2006.01); H01H 1/20 (2006.01); H01H 1/50 (2006.01)
CPC (source: EP)
H01H 59/0009 (2013.01); H01H 1/20 (2013.01); H01H 1/50 (2013.01); H01H 2001/0042 (2013.01); H01H 2001/0078 (2013.01)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SI SK TR
DOCDB simple family (publication)
WO 03060940 A1 20030724; AT E304736 T1 20050915; AU 2002361920 A1 20030730; EP 1357571 A1 20031029; EP 1468436 A1 20041020; EP 1468436 B1 20050914
DOCDB simple family (application)
CH 0200722 W 20021223; AT 02796487 T 20021223; AU 2002361920 A 20021223; EP 02405334 A 20020424; EP 02796487 A 20021223