EP 1468446 A1 20041020 - METHOD FOR PRODUCTION OF DIELECTRIC LAYERS USING POLYFUNCTIONAL CARBOSILANES
Title (en)
METHOD FOR PRODUCTION OF DIELECTRIC LAYERS USING POLYFUNCTIONAL CARBOSILANES
Title (de)
VERFAHREN ZUR HERSTELLUNG VON DIELEKTRISCHEN SCHICHTEN UNTER VERWENDUNG MULTIFUNKTIONELLER CARBOSILANE
Title (fr)
PROCEDE DE PRODUCTION DE COUCHES DIELECTRIQUES AVEC UTILISATION DE CARBOSILANE MULTIFONCTIONNEL
Publication
Application
Priority
- DE 10162443 A 20011219
- EP 0213834 W 20021206
Abstract (en)
[origin: WO03052809A1] A method for production of dielectric layers with low dielectric constants, by means of thermal treatment of a sol/gel product of a polyfunctional carbosilane is disclosed, along with corresponding layers and use thereof for the production of electronic components.
IPC 1-7
IPC 8 full level
C09D 5/25 (2006.01); H01L 21/312 (2006.01); H01L 21/316 (2006.01); H01L 21/768 (2006.01); H01L 23/498 (2006.01); H01L 23/532 (2006.01); H05K 1/03 (2006.01); H05K 3/46 (2006.01); H05K 1/00 (2006.01)
CPC (source: EP KR US)
H01L 21/02126 (2013.01 - EP US); H01L 21/02203 (2013.01 - EP US); H01L 21/02216 (2013.01 - EP US); H01L 21/02282 (2013.01 - EP US); H01L 21/31 (2013.01 - KR); H01L 21/3122 (2016.02 - US); H01L 21/31695 (2016.02 - US); H01L 21/76829 (2013.01 - EP US); H01L 23/49894 (2013.01 - EP US); H01L 23/5329 (2013.01 - EP US); H01L 2924/0002 (2013.01 - EP US); H01L 2924/3011 (2013.01 - EP US); H05K 3/4676 (2013.01 - EP US)
Citation (search report)
See references of WO 03052809A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SI SK TR
DOCDB simple family (publication)
WO 03052809 A1 20030626; AU 2002366351 A1 20030630; CN 100336183 C 20070905; CN 1605118 A 20050406; DE 10162443 A1 20030703; EP 1468446 A1 20041020; HK 1076918 A1 20060127; JP 2005513777 A 20050512; KR 20040068274 A 20040730; TW 200305618 A 20031101; TW I265964 B 20061111; US 2003181537 A1 20030925; US 7090896 B2 20060815
DOCDB simple family (application)
EP 0213834 W 20021206; AU 2002366351 A 20021206; CN 02825316 A 20021206; DE 10162443 A 20011219; EP 02804878 A 20021206; HK 05108731 A 20050930; JP 2003553609 A 20021206; KR 20047009515 A 20021206; TW 91136453 A 20021218; US 31912102 A 20021213