EP 1469701 A2 20041020 - Raised microstructures
Title (en)
Raised microstructures
Title (de)
Erhobene Mikrostrukturen
Title (fr)
Microstructures en relief
Publication
Application
Priority
- EP 01959715 A 20010810
- US 63740100 A 20000811
- US 91011001 A 20010720
Abstract (en)
A raised micro-structure is disclosed for use in a silicon based device. The raised micro-structure comprises a generally planar film having a ribbed sidewall supporting the film.
IPC 1-7
IPC 8 full level
H04R 19/04 (2006.01); B06B 1/04 (2006.01); H04R 19/00 (2006.01); H04R 31/00 (2006.01)
CPC (source: EP KR)
H04R 19/005 (2013.01 - EP); H04R 19/04 (2013.01 - KR); H04R 31/00 (2013.01 - EP); H04R 31/006 (2013.01 - EP)
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
WO 0215636 A2 20020221; WO 0215636 A3 20021024; AT E321429 T1 20060415; AT E392790 T1 20080515; AU 8124101 A 20020225; CN 101867858 A 20101020; CN 101867858 B 20120222; CN 1498513 A 20040519; CN 1498513 B 20100714; DE 60118208 D1 20060511; DE 60118208 T2 20070412; DE 60133679 D1 20080529; DE 60133679 T2 20090610; DK 1310136 T3 20060731; DK 1469701 T3 20080818; EP 1310136 A2 20030514; EP 1310136 B1 20060322; EP 1469701 A2 20041020; EP 1469701 A3 20051116; EP 1469701 B1 20080416; JP 2004506394 A 20040226; JP 2007116721 A 20070510; JP 2009153203 A 20090709; JP 4338395 B2 20091007; JP 5049312 B2 20121017; KR 100571967 B1 20060418; KR 20030033026 A 20030426
DOCDB simple family (application)
US 0125184 W 20010810; AT 01959715 T 20010810; AT 04076015 T 20010810; AU 8124101 A 20010810; CN 01814030 A 20010810; CN 201010206225 A 20010810; DE 60118208 T 20010810; DE 60133679 T 20010810; DK 01959715 T 20010810; DK 04076015 T 20010810; EP 01959715 A 20010810; EP 04076015 A 20010810; JP 2002519372 A 20010810; JP 2006300831 A 20061106; JP 2009088945 A 20090401; KR 20037002017 A 20030211