EP 1470579 A1 20041027 - PGO SOLUTIONS FOR THE PREPARATION OF PGO THIN FILMS VIA SPIN COATING
Title (en)
PGO SOLUTIONS FOR THE PREPARATION OF PGO THIN FILMS VIA SPIN COATING
Title (de)
PGO LÖSUNGEN FÜR DIE HERSTELLUNG VON DÜNNEN PGO FILMEN MITTELS SPIN-COATINGS
Title (fr)
SOLUTIONS DE PGO UTILISEES DANS LA PREPARATION DE FILMS MINCES DE PGO PAR REVETEMENT PAR CENTRIFUGATIONSOLUTIONS DE PGO UTILISEES DANS LA PREPARATION DE FILMS MINCES DE PGO PAR REVETEMENT PAR CENTRIFUGATION
Publication
Application
Priority
JP 0200807 W 20020131
Abstract (en)
[origin: WO03065438A1] A method of preparing a PGO solution for spin coating includes preparing a 2-methoxyethanol organic solvent; adding Pb(OCH3CO)2¥3H2O to the organic solvent at ambient temperature and pressure in a nitrogen-filled gloved box to form Pb in methoxyethanol; refluxing the solution in a nitrogen atmosphere at 150 Ž for at least two hours; fractionally distilling the refluxed solution at approximately 150 Ž to remove all of the water from the solution; cooling the solution to room temperature; determining the Pb concentration of the solution; adding the 2-methoxyethanol solution to the Pb 2-methoxyethanol until a desired Pb concentration is achieved; combining Ge(OR)4, where R is taken from the group of Rs consisting of CH2CH3 and CH(CH3)2, and 2-methoxyethanol; and adding Ge(OR)4 2-methoxyethanol to PbO 2-methoxyethanol to form the PGO solution having a predetermined metal ion concentration and a predetermined Pb:Ge molar ratio.
IPC 1-7
IPC 8 full level
H01L 21/316 (2006.01); H01L 21/314 (2006.01)
CPC (source: EP KR US)
H01L 21/02175 (2013.01 - EP KR US); H01L 21/02282 (2013.01 - KR US); H01L 21/02282 (2013.01 - EP)
Citation (search report)
See references of WO 03065438A1
DOCDB simple family (publication)
WO 03065438 A1 20030807; EP 1470579 A1 20041027; JP 2005527104 A 20050908; JP 3956309 B2 20070808; KR 100575037 B1 20060428; KR 20040012974 A 20040211
DOCDB simple family (application)
JP 0200807 W 20020131; EP 02711271 A 20020131; JP 2003564927 A 20020131; KR 20037016903 A 20031224