EP 1470594 A2 20041027 - SYNTHESIS OF LAYERS, COATINGS OR FILMS USING PRESSURE CONTAINMENT EXERTED ON PRECURSOR LAYERS
Title (en)
SYNTHESIS OF LAYERS, COATINGS OR FILMS USING PRESSURE CONTAINMENT EXERTED ON PRECURSOR LAYERS
Title (de)
HERSTELLUNGSVERFAHREN VON SCHICHTEN, BESCHICHTUNGEN ODER FOLIEN DURCH DRUCKANWENDUNG AUF VORLÄUFERSCHICHTEN
Title (fr)
SYNTHESE DE COUCHES, DE REVETEMENTS OU DE FILMS PAR LIMITATION DE LA PRESSION EXERCEE SUR UNE COUCHE DE PRECURSEUR
Publication
Application
Priority
- US 0229605 W 20020919
- US 95712501 A 20010920
- US 95705001 A 20010920
- US 95712301 A 20010920
- US 95712101 A 20010920
- US 95713201 A 20010920
- US 95720701 A 20010920
Abstract (en)
[origin: WO03026022A2] Systems and methods are described for synthesis of films, coatings or layers using surfactants. A method includes providing a surfactant 627, 633, 655 as an impurity within at least one of a first precursor layer 630 that is coupled to a first substrate 610 and a second precursor layer 650 that is coupled to a second substrate 640; forming a composition layer 660; and moving the first substrate 610 relative to the second substrate 640, wherein the composition layer 660 remains coupled to the second substrate.
IPC 1-7
IPC 8 full level
H01L 31/032 (2006.01); H01L 31/0336 (2006.01); H01L 31/18 (2006.01)
CPC (source: EP US)
C23C 14/0005 (2013.01 - EP US); C23C 14/0623 (2013.01 - EP US); C23C 14/56 (2013.01 - EP US); C23C 16/01 (2013.01 - EP US); C23C 16/305 (2013.01 - EP US); C23C 16/54 (2013.01 - EP US); C23C 26/00 (2013.01 - EP US); H01L 31/0322 (2013.01 - EP US); H01L 31/03928 (2013.01 - EP US); H01L 31/0749 (2013.01 - EP); H01L 31/18 (2013.01 - EP); H01L 31/1892 (2013.01 - EP US); Y02E 10/541 (2013.01 - EP US); Y02P 70/50 (2015.11 - US)
Citation (search report)
See references of WO 03026023A2
DOCDB simple family (publication)
WO 03026022 A2 20030327; WO 03026022 A3 20031120; AU 2002325038 B2 20060309; AU 2002326953 A1 20030401; AU 2002334597 B2 20051222; EP 1470593 A2 20041027; EP 1470594 A2 20041027; EP 1476906 A2 20041117; WO 03026023 A2 20030327; WO 03026023 A3 20040415; WO 03026024 A2 20030327; WO 03026024 A3 20031231; WO 03026025 A2 20030327; WO 03026025 A3 20031218; WO 03026026 A2 20030327; WO 03026026 A3 20031218; WO 03026028 A2 20030327; WO 03026028 A3 20031218; ZA 200404979 B 20050727; ZA 200404981 B 20050928
DOCDB simple family (application)
US 0229529 W 20020918; AU 2002325038 A 20020919; AU 2002326953 A 20020919; AU 2002334597 A 20020918; EP 02759721 A 20020919; EP 02761712 A 20020919; EP 02799001 A 20020918; US 0229605 W 20020919; US 0229607 W 20020919; US 0229608 W 20020919; US 0229684 W 20020918; US 0229701 W 20020918; ZA 200404979 A 20040623; ZA 200404981 A 20040623