EP 1472017 A1 20041103 - METHOD FOR CLEANING AN ARTICLE
Title (en)
METHOD FOR CLEANING AN ARTICLE
Title (de)
VERFAHREN ZUR REINIGUNG EINES ARTIKELS
Title (fr)
PROCEDE DE NETTOYAGE D'UN ARTICLE
Publication
Application
Priority
- US 0300529 W 20030107
- US 34650702 P 20020107
Abstract (en)
[origin: WO03057377A1] A method for cleaning an article includes the steps of contacting the article with a solvent fluid that includes carbon dioxide, whereby contaminants on the article dissolve in the solvent fluid and displacing the solvent fluid with a displacing fluid, that is other than carbon dioxide. In one aspect, the displacing fluid is at a temperature and pressure sufficient to prevent forming a second phase in the solvent fluid being displaced and at least a portion of the carbon dioxide is recycled to the article. In another aspect, the pressure of the solvent fluid is reduced prior to its displacement with the displacing gas.
IPC 1-7
IPC 8 full level
B08B 7/00 (2006.01); C11D 7/04 (2006.01); C11D 7/06 (2006.01); C11D 7/08 (2006.01); C11D 7/30 (2006.01); C11D 7/50 (2006.01); C11D 11/00 (2006.01); H01L 21/027 (2006.01); H01L 21/304 (2006.01)
CPC (source: EP KR)
B08B 7/00 (2013.01 - EP); B08B 7/0021 (2013.01 - EP); C11D 7/04 (2013.01 - EP); C11D 7/06 (2013.01 - EP); C11D 7/08 (2013.01 - EP); C11D 7/30 (2013.01 - EP); C11D 7/50 (2013.01 - EP); H01L 21/304 (2013.01 - KR); C11D 2111/22 (2024.01 - EP)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT SE SI SK TR
DOCDB simple family (publication)
WO 03057377 A1 20030717; AU 2003235748 A1 20030724; CA 2472478 A1 20030717; CN 1741863 A 20060301; EP 1472017 A1 20041103; EP 1472017 A4 20070321; JP 2005515619 A 20050526; KR 20040073548 A 20040819; TW 200412631 A 20040716; TW I291200 B 20071211
DOCDB simple family (application)
US 0300529 W 20030107; AU 2003235748 A 20030107; CA 2472478 A 20030107; CN 03805442 A 20030107; EP 03729378 A 20030107; JP 2003557723 A 20030107; KR 20047010594 A 20030107; TW 92100342 A 20030108