EP 1472047 A1 20041103 - ADVANCED CHEMICAL MECHANICAL POLISHING SYSTEM WITH SMART ENDPOINT DETECTION
Title (en)
ADVANCED CHEMICAL MECHANICAL POLISHING SYSTEM WITH SMART ENDPOINT DETECTION
Title (de)
FORTSCHRITTLICHES CHEMISCHES-MECHANISCHES POLIERSYSTEM MIT INTELLIGENTER ENDPUNKTERKENNUNG
Title (fr)
SYSTEME DE POLISSAGE MECANO-CHIMIQUE AMELIORE A DETECTION D'EXTREMITE TERMINALE INTELLIGENTE
Publication
Application
Priority
- US 0301704 W 20030117
- US 5247502 A 20020117
- US 36501602 P 20020312
- US 10501602 A 20020322
- US 19709002 A 20020715
- US 39711002 P 20020719
- US 41457902 P 20020927
- US 41754402 P 20021010
- US 32115002 A 20021217
- US 43610802 P 20021223
- US 43670602 P 20021227
Abstract (en)
[origin: WO03074228A1] An apparatus for polishing a workpiece includes a workpiece holder 104 configured to hold the workpiece, a polishing member 102 configured to be positioned adjacent to a face of the workpiece in order to polish the workpiece face with a front side of the polishing member, and a platen 600 having a plurality of pressure zones zl-z4 configured to selectively apply pressure to the polishing member thereby causing the polishing member to contact the workpiece face with selective pressure. In another embodiment, the apparatus includes a pressure controller 564 coupled to the platen and configured to selectively adjust the pressure zones zl-z4.
IPC 1-7
IPC 8 full level
B24B 49/12 (2006.01); B24B 1/00 (2006.01); B24B 17/10 (2006.01); B24B 21/04 (2006.01); B24B 37/20 (2012.01); B24B 49/16 (2006.01); H01L 21/304 (2006.01)
CPC (source: EP KR)
B24B 21/00 (2013.01 - KR); B24B 21/04 (2013.01 - EP); B24B 37/205 (2013.01 - EP); B24B 49/02 (2013.01 - KR); B24B 49/16 (2013.01 - EP); H01L 21/302 (2013.01 - KR)
Citation (search report)
See references of WO 03074228A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT SE SI SK TR
DOCDB simple family (publication)
WO 03074228 A1 20030912; AU 2003248673 A1 20030916; EP 1472047 A1 20041103; JP 2005525244 A 20050825; KR 20040081136 A 20040920
DOCDB simple family (application)
US 0301704 W 20030117; AU 2003248673 A 20030117; EP 03743660 A 20030117; JP 2003572724 A 20030117; KR 20047011144 A 20030117