EP 1477684 B1 20071107 - Molecular,turbo-molecular or hybrid pump with intergral valve
Title (en)
Molecular,turbo-molecular or hybrid pump with intergral valve
Title (de)
Molekular, Turbomolekular oder Hybridpumpe mit intergriertem Ventil
Title (fr)
Pompe moléculaire, turbomoléculaire ou hybride à vanne integrée
Publication
Application
Priority
FR 0305724 A 20030513
Abstract (en)
[origin: EP1477684A1] The pump has an outlet radial orifice (23) crossing a cylindrical peripheral wall (17). An integrated isolation and control valve has a coaxial annular closure unit (24) that comes in support against the wall around a radial outlet opening. The unit is axially driven by a motor (8) to place a shutter (26) opposite to the orifice for controlling an opening of the valve and regulating a flow of gas pumped by the pump. An independent claim is also included for a gas pumping system comprising a molecular, turbo-molecular, or hybrid pump.
IPC 8 full level
F04D 19/04 (2006.01); F04B 37/16 (2006.01); F04D 27/00 (2006.01)
CPC (source: EP US)
F04D 19/04 (2013.01 - EP US); F04D 27/00 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
EP 1477684 A1 20041117; EP 1477684 B1 20071107; AT E377711 T1 20071115; DE 602004009857 D1 20071220; DE 602004009857 T2 20080828; FR 2854933 A1 20041119; FR 2854933 B1 20050805; JP 2004340147 A 20041202; JP 4560331 B2 20101013; US 2004228747 A1 20041118; US 7311491 B2 20071225
DOCDB simple family (application)
EP 04291161 A 20040505; AT 04291161 T 20040505; DE 602004009857 T 20040505; FR 0305724 A 20030513; JP 2004142872 A 20040512; US 84335404 A 20040512