EP 1478970 A1 20041124 - METHOD FOR MANUFACTURING FLAT PANEL DISPLAY SUBSTRATES
Title (en)
METHOD FOR MANUFACTURING FLAT PANEL DISPLAY SUBSTRATES
Title (de)
VERFAHREN ZUR HERSTELLUNG VON FLACHDISPLAYSUBSTRATEN
Title (fr)
PROCEDE DE FABRICATION DE SUBSTRATS D'AFFICHAGE A PANNEAUX PLATS
Publication
Application
Priority
- IL 0300142 W 20030224
- US 35873402 P 20020225
Abstract (en)
[origin: WO03071344A1] A system an method for generating thin film transistors, the system employing a non-excimer laser beam interacting with amorphous silicon disposed on a substrate surface to form mutually spaced apart silicon crystals on the surface.
IPC 1-7
IPC 8 full level
G02F 1/1368 (2006.01); H01L 21/20 (2006.01); H01L 21/268 (2006.01); H01L 21/336 (2006.01); H01L 29/786 (2006.01)
CPC (source: EP KR)
G02F 1/13 (2013.01 - KR); G02F 1/136 (2013.01 - KR); H01L 21/02532 (2013.01 - EP); H01L 21/02686 (2013.01 - EP); H01L 21/02691 (2013.01 - EP); H01L 29/6675 (2013.01 - EP)
Citation (search report)
See references of WO 03071344A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT SE SI SK TR
DOCDB simple family (publication)
WO 03071344 A1 20030828; AU 2003209628 A1 20030909; EP 1478970 A1 20041124; IL 163572 A0 20051218; JP 2005518658 A 20050623; KR 20040088536 A 20041016; TW 200305915 A 20031101
DOCDB simple family (application)
IL 0300142 W 20030224; AU 2003209628 A 20030224; EP 03742652 A 20030224; IL 16357203 A 20030224; JP 2003570178 A 20030224; KR 20047013215 A 20030224; TW 92103910 A 20030225