EP 1481413 A2 20041201 - INDIRECTLY HEATED BUTTON CATHODE FOR AN ION SOURCE
Title (en)
INDIRECTLY HEATED BUTTON CATHODE FOR AN ION SOURCE
Title (de)
INDIREKT GEHEIZTE KNOPFKATHODE FÜR EINE IONENQUELLE
Title (fr)
CATHODE POSSEDANT UN BOUTON A RECHAUFFEMENT INDIRECT POUR SOURCE D'IONS
Publication
Application
Priority
- GB 0300733 W 20030220
- US 9135102 A 20020306
- US 25982702 A 20020930
Abstract (en)
[origin: WO03075305A2] An indirectly heated button cathode for use in the ion source of an ion implanter has a button member formed of a slug piece mounted in a collar piece. The slug piece is thermally insulated from the collar piece to enable it to operate at a higher temperature so that electron emission is enhanced and concentrated over the surface of the slug piece. The slug piece and collar piece can be both of tungsten. Instead the slug piece may be of tantalum to provide a lower thermionic work function. The resultant concentrated plasma in the ion source is effective to enhance the production of higher charge state ions, particularly P+++ for subsequent acceleration for high energy implantation.
IPC 1-7
IPC 8 full level
H01J 27/02 (2006.01); H01J 27/04 (2006.01); H01J 27/08 (2006.01); H01J 37/00 (2006.01); H01J 37/08 (2006.01); H01J 37/317 (2006.01)
CPC (source: EP)
H01J 27/08 (2013.01); H01J 37/08 (2013.01); H01J 2237/31701 (2013.01)
Citation (search report)
See references of WO 03075305A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT SE SI SK TR
DOCDB simple family (publication)
WO 03075305 A2 20030912; WO 03075305 A3 20031127; AU 2003208427 A1 20030916; AU 2003208427 A8 20030916; EP 1481413 A2 20041201; JP 2005519433 A 20050630; JP 4271584 B2 20090603
DOCDB simple family (application)
GB 0300733 W 20030220; AU 2003208427 A 20030220; EP 03706715 A 20030220; JP 2003573666 A 20030220