Global Patent Index - EP 1481413 A2

EP 1481413 A2 2004-12-01 - INDIRECTLY HEATED BUTTON CATHODE FOR AN ION SOURCE

Title (en)

INDIRECTLY HEATED BUTTON CATHODE FOR AN ION SOURCE

Title (de)

INDIREKT GEHEIZTE KNOPFKATHODE FÜR EINE IONENQUELLE

Title (fr)

CATHODE POSSEDANT UN BOUTON A RECHAUFFEMENT INDIRECT POUR SOURCE D'IONS

Publication

EP 1481413 A2 (EN)

Application

EP 03706715 A

Priority

  • GB 0300733 W
  • US 9135102 A
  • US 25982702 A

Abstract (en)

[origin: WO03075305A2] An indirectly heated button cathode for use in the ion source of an ion implanter has a button member formed of a slug piece mounted in a collar piece. The slug piece is thermally insulated from the collar piece to enable it to operate at a higher temperature so that electron emission is enhanced and concentrated over the surface of the slug piece. The slug piece and collar piece can be both of tungsten. Instead the slug piece may be of tantalum to provide a lower thermionic work function. The resultant concentrated plasma in the ion source is effective to enhance the production of higher charge state ions, particularly P+++ for subsequent acceleration for high energy implantation.

IPC 1-7 (main, further and additional classification)

H01J 37/00

IPC 8 full level (invention and additional information)

H01J 27/02 (2006.01); H01J 27/04 (2006.01); H01J 27/08 (2006.01); H01J 37/00 (2006.01); H01J 37/08 (2006.01); H01J 37/317 (2006.01)

CPC (invention and additional information)

H01J 37/08 (2013.01); H01J 27/08 (2013.01); H01J 2237/31701 (2013.01)

Citation (search report)

See references of WO 03075305A3

Designated contracting state (EPC)

AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT SE SI SK TR

EPO simple patent family

WO 03075305 A2 20030912; WO 03075305 A3 20031127; AU 2003208427 A1 20030916; AU 2003208427 A8 20030916; EP 1481413 A2 20041201; JP 2005519433 A 20050630; JP 4271584 B2 20090603

INPADOC legal status


2006-03-15 [18D] APPLICATION DEEMED TO BE WITHDRAWN

- Effective date: 20050901

2005-03-02 [RIN1] INVENTOR CHANGED BEFORE GRANT

- Inventor name: FARLEY, MARVIN

2005-03-02 [RIN1] INVENTOR CHANGED BEFORE GRANT

- Inventor name: SAKASE, TAKAO

2005-03-02 [RIN1] INVENTOR CHANGED BEFORE GRANT

- Inventor name: SATOH, SHU

2005-03-02 [RIN1] INVENTOR CHANGED BEFORE GRANT

- Inventor name: RYDING, GEOFFREY

2005-03-02 [RIN1] INVENTOR CHANGED BEFORE GRANT

- Inventor name: ROSE, PETER

2005-03-02 [RIN1] INVENTOR CHANGED BEFORE GRANT

- Inventor name: CHRISTOU, CHRISTOS

2004-12-01 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20040816

2004-12-01 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A2

- Designated State(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT SE SI SK TR

2004-12-01 [AX] REQUEST FOR EXTENSION OF THE EUROPEAN PATENT TO:

- Countries: AL LT LV MK RO