EP 1483182 A2 20041208 - REINFORCED CHEMICAL MECHANICAL PLANARIZATION BELT

Title (en)

REINFORCED CHEMICAL MECHANICAL PLANARIZATION BELT

Title (de)

VERSTÄRKTER RIEMEN FÜR CHEMISCH-MECHANISCHES-PLANARISIEREN

Title (fr)

COURROIE DE PLANARISATION CHIMICO-MECANIQUE RENFORCEE

Publication

EP 1483182 A2 20041208 (EN)

Application

EP 03711516 A 20030310

Priority

US 0307389 W 20030310
US 9733702 A 20020312
US 11244702 A 20020329

Abstract (en)

[origin: WO03078859A2] A processing belt (150, 160, 170) for use in chemical mechanical planarization (CMP), is provided. The processing belt is reinforced with one of a mesh belt (154) and a woven fabric (164). The processing belt includes a polymeric material (152) encasing the mesh belt to define the processing belt. The processing belt is fabricated so that the mesh belt forms a continuous loop within the polymeric material, and the mesh belt is constructed as a grid of intersecting members (174). The intersecting members are joined at fixed joints (176) to form a rigid support structure for the processing belt.

IPC 1-7

B65G 15/34

IPC 8 full level

B24B 21/00 (2006.01); B24B 23/06 (2006.01); B24B 37/013 (2012.01); B24B 37/20 (2012.01); B24D 11/00 (2006.01); B29D 29/00 (2006.01); H01L 21/304 (2006.01)

CPC (source: EP KR)

B24B 37/013 (2013.01 - EP); B24B 37/205 (2013.01 - EP); B24D 11/02 (2013.01 - EP); B29D 29/00 (2013.01 - EP); B65G 15/30 (2013.01 - KR); B65G 15/34 (2013.01 - KR); B32B 2305/08 (2013.01 - EP); B32B 2413/00 (2013.01 - EP)

Designated contracting state (EPC)

AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR

DOCDB simple family (publication)

WO 03078859 A2 20030925; WO 03078859 A3 20040325; AU 2003213823 A1 20030929; AU 2003213823 A8 20030929; CN 1639034 A 20050713; EP 1483182 A2 20041208; EP 1483182 A4 20070425; JP 2005520335 A 20050707; KR 20040105766 A 20041216; TW 200304180 A 20030916; TW 586158 B 20040501

DOCDB simple family (application)

US 0307389 W 20030310; AU 2003213823 A 20030310; CN 03805654 A 20030310; EP 03711516 A 20030310; JP 2003576832 A 20030310; KR 20047014272 A 20030310; TW 92105436 A 20030312