EP 1483773 A2 20041208 - DEVICE FOR ACTIVATING GASES IN A VACUUM
Title (en)
DEVICE FOR ACTIVATING GASES IN A VACUUM
Title (de)
VORRICHTUNG ZUR AKTIVIERUNG VON GASEN IM VAKUUM
Title (fr)
DISPOSITIF D'ACTIVATION DE GAZ DANS LE VIDE
Publication
Application
Priority
- DE 10211332 A 20020314
- EP 0300152 W 20030109
Abstract (en)
[origin: WO03077279A2] The invention relates to a device for activating a gas that traverses said device using a hollow cathode glow discharge. Said device consists of a housing provided with at least one gas feed and at least one opening for discharging the gas, a hollow cathode, in addition to an inner chamber that is delimited by the housing and contains an anode. The dimensions of the opening or openings for discharging the gas in relation to the wall thickness of the hollow cathode are chosen in such a way that the hollow cathode glow discharge is confined to the inner chamber.
IPC 1-7
IPC 8 full level
H01J 37/32 (2006.01); H05H 1/24 (2006.01)
CPC (source: EP US)
H01J 37/32018 (2013.01 - EP US); H05H 1/4697 (2021.05 - EP); H01J 2237/335 (2013.01 - EP)
Citation (search report)
See references of WO 03077279A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT SE SI SK TR
DOCDB simple family (publication)
WO 03077279 A2 20030918; WO 03077279 A3 20040325; DE 10211332 A1 20031002; DE 10211332 B4 20090702; EP 1483773 A2 20041208
DOCDB simple family (application)
EP 0300152 W 20030109; DE 10211332 A 20020314; EP 03743795 A 20030109