Global Patent Index - EP 1485518 A1

EP 1485518 A1 2004-12-15 - DEVICE FOR DEPOSITING THIN LAYERS ON A SUBSTRATE

Title (en)

DEVICE FOR DEPOSITING THIN LAYERS ON A SUBSTRATE

Title (de)

VORRICHTUNG ZUM ABSCHEIDEN VON D NNEN SCHICHTEN AUF EINEM SU BSTRAT

Title (fr)

DISPOSITIF DE DEPOT DE FINES COUCHES SUR UN SUBSTRAT

Publication

EP 1485518 A1 (DE)

Application

EP 03708229 A

Priority

  • DE 10211442 A
  • EP 0302608 W

Abstract (en)

[origin: WO03078681A1] The invention relates to a device for depositing thin layers on a substrate, comprising a process chamber (6) arranged in a reactor housing (1), the bottom of said process chamber being formed by a susceptor (7) for receiving at least one substrate and a gas inlet organ (2) being assigned to the lid of said process chamber, wherein the process gas can be introduced into the process chamber by means of a gas outlet surface which is substantially evenly distributed on the surface thereof and which points towards the susceptor. In order to prevent parasitic accumulation in the gas inlet organ, the gas outlet surface is formed by a gas-permeable diffuser plate (15), which can extend parallel to a gas outlet plate (13) having a plurality of gas outlet holes (14) arranged in the form of sieves.

IPC 1-7 (main, further and additional classification)

C23C 16/455

IPC 8 full level (invention and additional information)

C23C 16/455 (2006.01); H01L 21/205 (2006.01); C23C 16/44 (2006.01)

CPC (invention and additional information)

C23C 16/45568 (2013.01); C23C 16/455 (2013.01); C23C 16/45572 (2013.01)

Citation (search report)

See references of WO 03078681A1

Designated contracting state (EPC)

AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR

EPO simple patent family

WO 03078681 A1 20030925; AU 2003212349 A1 20030929; DE 10211442 A1 20030925; EP 1485518 A1 20041215; JP 2005520932 A 20050714; KR 20040101261 A 20041202; TW 200305658 A 20031101

INPADOC legal status


2011-06-22 [18D] DEEMED TO BE WITHDRAWN

- Effective date: 20110105

2010-07-28 [17Q] FIRST EXAMINATION REPORT

- Effective date: 20100624

2009-08-05 [RAP1] TRANSFER OF RIGHTS OF AN EP PUBLISHED APPLICATION

- Owner name: AIXTRON AG

2004-12-15 [17P] REQUEST FOR EXAMINATION FILED

- Effective date: 20040910

2004-12-15 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A1

- Designated State(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR

2004-12-15 [AX] REQUEST FOR EXTENSION OF THE EUROPEAN PATENT TO

- Countries: AL LT LV MK