EP 1485762 A2 20041215 - DEVICE FOR MANIPULATION OF THE ANGULAR POSITION OF AN OBJECT RELATIVE TO A FIXED STRUCTURE
Title (en)
DEVICE FOR MANIPULATION OF THE ANGULAR POSITION OF AN OBJECT RELATIVE TO A FIXED STRUCTURE
Title (de)
VORRICHTUNG ZUR MANIPULATION DER WINKELLAGE EINES GEGENSTANDS GEGEN BER EINER FESTEN STRUKTUR
Title (fr)
DISPOSITIF PERMETTANT DE MODIFIER LA POSITION ANGULAIRE D'UN OBJET PAR RAPPORT A UNE STRUCTURE FIXE
Publication
Application
Priority
- DE 10212547 A 20020321
- EP 0302778 W 20030318
Abstract (en)
[origin: WO03081337A2] The invention relates to a device for manipulation of the angular position of an object (1) relative to a fixed structure (4), into which the object, in particular an optical element of a lens group for microlithography, is introduced, about three rotational axes (x, y, z), intersecting at a point. The object (1) can also be held in a support frame (2). The support frame (2), with the object (1) is connected to the fixed structure (4) by means of three connection limbs (3a, b, c, , n) each with three rotational degrees of freedom and one translational degree of freedom. The angular position of the support frame (2) is adjustable about each one of the three rotational axes (x, y, z), by means of one of the connection limbs (3a, b, c, , n).
IPC 1-7
IPC 8 full level
G02B 7/00 (2006.01); G02B 7/02 (2006.01); G02B 7/18 (2006.01); G02B 7/198 (2006.01); G03F 7/20 (2006.01); H01L 21/027 (2006.01)
CPC (source: EP)
G02B 7/023 (2013.01); G02B 7/18 (2013.01); G03F 7/70258 (2013.01); G03F 7/70825 (2013.01)
Citation (search report)
See references of WO 03081337A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 03081337 A2 20031002; WO 03081337 A3 20040205; AU 2003209739 A1 20031008; AU 2003209739 A8 20031008; DE 10212547 A1 20031002; EP 1485762 A2 20041215; JP 2005521104 A 20050714; JP 4465194 B2 20100519
DOCDB simple family (application)
EP 0302778 W 20030318; AU 2003209739 A 20030318; DE 10212547 A 20020321; EP 03744806 A 20030318; JP 2003579008 A 20030318