Global Patent Index - EP 1485762 A2

EP 1485762 A2 2004-12-15 - DEVICE FOR MANIPULATION OF THE ANGULAR POSITION OF AN OBJECT RELATIVE TO A FIXED STRUCTURE

Title (en)

DEVICE FOR MANIPULATION OF THE ANGULAR POSITION OF AN OBJECT RELATIVE TO A FIXED STRUCTURE

Title (de)

VORRICHTUNG ZUR MANIPULATION DER WINKELLAGE EINES GEGENSTANDS GEGEN BER EINER FESTEN STRUKTUR

Title (fr)

DISPOSITIF PERMETTANT DE MODIFIER LA POSITION ANGULAIRE D'UN OBJET PAR RAPPORT A UNE STRUCTURE FIXE

Publication

EP 1485762 A2 (DE)

Application

EP 03744806 A

Priority

  • DE 10212547 A
  • EP 0302778 W

Abstract (en)

[origin: WO03081337A2] The invention relates to a device for manipulation of the angular position of an object (1) relative to a fixed structure (4), into which the object, in particular an optical element of a lens group for microlithography, is introduced, about three rotational axes (x, y, z), intersecting at a point. The object (1) can also be held in a support frame (2). The support frame (2), with the object (1) is connected to the fixed structure (4) by means of three connection limbs (3a, b, c, , n) each with three rotational degrees of freedom and one translational degree of freedom. The angular position of the support frame (2) is adjustable about each one of the three rotational axes (x, y, z), by means of one of the connection limbs (3a, b, c, , n).

IPC 1-7 (main, further and additional classification)

G03F 7/20; G02B 7/00; G02B 7/18; G02B 7/182

IPC 8 full level (invention and additional information)

G02B 7/00 (2006.01); G02B 7/02 (2006.01); G02B 7/18 (2006.01); G02B 7/198 (2006.01); G03F 7/20 (2006.01); H01L 21/027 (2006.01)

CPC (invention and additional information)

G03F 7/70258 (2013.01); G02B 7/023 (2013.01); G02B 7/18 (2013.01); G03F 7/70825 (2013.01)

Citation (search report)

See references of WO 03081337A3

Designated contracting state (EPC)

AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR

EPO simple patent family

WO 03081337 A2 20031002; WO 03081337 A3 20040205; AU 2003209739 A1 20031008; AU 2003209739 A8 20031008; DE 10212547 A1 20031002; EP 1485762 A2 20041215; JP 2005521104 A 20050714; JP 4465194 B2 20100519

INPADOC legal status


2005-05-04 [18D] APPLICATION DEEMED TO BE WITHDRAWN

- Effective date: 20050318

2004-12-15 [AK] DESIGNATED CONTRACTING STATES:

- Kind Code of Ref Document: A2

- Designated State(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR

2004-12-15 [AX] REQUEST FOR EXTENSION OF THE EUROPEAN PATENT TO:

- Countries: AL LT LV MK