EP 1485937 A2 20041215 - USE OF LIGHT EMITTING CHEMICAL REACTIONS FOR CONTROL OF SEMICONDUCTOR PRODUCTION PROCESSES
Title (en)
USE OF LIGHT EMITTING CHEMICAL REACTIONS FOR CONTROL OF SEMICONDUCTOR PRODUCTION PROCESSES
Title (de)
VERWENDUNG LICHTEMITTIERENDER CHEMISCHER REAKTIONEN ZUR STEUERUNG VON HALBLEITERHERSTELLUNGSPROZESSEN
Title (fr)
UTILISATION DE REACTIONS CHIMIQUES EMETTRICES DE LUMIERE POUR CONTROLER LES PROCEDES DE PRODUCTION DE SEMI-CONDUCTEURS
Publication
Application
Priority
- GB 0301104 W 20030314
- GB 0206158 A 20020315
Abstract (en)
[origin: WO03079411A2] A low-pressure processing vessel (3) used for the production of semiconductors is provided with a light-sensitive detector (1) at a distance from the reaction site, for example in the exhaust line (2). The detector (1) is used to detect light emitted by an intermediate which relaxes or recombines with the emission of light at a characteristic wavelength, the intermediate having a long lifetime such that the detector (1) can be positioned in a relatively remote location.
IPC 1-7
IPC 8 full level
H01L 21/3065 (2006.01); H01L 21/00 (2006.01); H01L 21/205 (2006.01)
CPC (source: EP KR US)
H01J 37/32935 (2013.01 - EP US); H01L 21/67069 (2013.01 - EP US); H01L 21/67253 (2013.01 - EP US); H01L 22/00 (2013.01 - KR)
Citation (search report)
See references of WO 03079411A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 03079411 A2 20030925; WO 03079411 A3 20031218; AU 2003226491 A1 20030929; AU 2003226491 A8 20030929; EP 1485937 A2 20041215; GB 0206158 D0 20020424; JP 2005521242 A 20050714; KR 20040094794 A 20041110; US 2005103438 A1 20050519
DOCDB simple family (application)
GB 0301104 W 20030314; AU 2003226491 A 20030314; EP 03744445 A 20030314; GB 0206158 A 20020315; JP 2003577311 A 20030314; KR 20047014351 A 20030314; US 50862804 A 20040914