EP 1486815 A4 20050824 - MEMS DEVICE AND ITS MANUFACTURING METHOD, OPTICAL MODULATOR, GLV DEVICE AND ITS MANUFACTURING METHOD, AND LASER DISPLAY
Title (en)
MEMS DEVICE AND ITS MANUFACTURING METHOD, OPTICAL MODULATOR, GLV DEVICE AND ITS MANUFACTURING METHOD, AND LASER DISPLAY
Title (de)
MEMS-BAUSTEIN UND VERFAHREN ZU SEINER HERSTELLUNG, OPTISCHER MODULATOR, GLV-BAUSTEIN UND VERFAHREN ZU SEINER HERSTELLUNG UND LASERANZEIGE
Title (fr)
DISPOSITIF MEMS ET SON PROCEDE DE FABRICATION, MODULATEUR OPTIQUE, DISPOSITIF GLV ET SON PROCEDE DE FABRICATION, ET ECRAN A LASER
Publication
Application
Priority
- JP 0301659 W 20030217
- JP 2002042029 A 20020219
Abstract (en)
[origin: US2004150869A1] The present invention provides a MEMS device and methods for manufacturing thereof, in which planarizing the surface of a beam and improving performance of the MEMS device are aimed. In addition, the present invention provides a light modulation device and a GLV device in which this MEMS device is used, and methods for manufacturing thereof; and further, a laser display using this GLV device. According to the present invention, a MEMS device includes a substrate side electrode and a beam that is disposed so as to oppose the substrate side electrode and is driven by electrostatic attraction force or electrostatic repulsion force that acts between the substrate side electrode and the driving side electrode, with the substrate side electrode being formed of a single-crystalline semiconductor layer.
IPC 1-7
IPC 8 full level
B81B 3/00 (2006.01); G02B 26/08 (2006.01)
CPC (source: EP KR US)
B81B 3/0083 (2013.01 - EP US); B81B 7/02 (2013.01 - KR); G02B 26/0808 (2013.01 - EP US); B81B 2201/042 (2013.01 - EP US); B81B 2203/0109 (2013.01 - EP US)
Citation (search report)
- [X] EP 1139159 A2 20011004 - LUCENT TECHNOLOGIES INC [US]
- [A] US 5488862 A 19960206 - NEUKERMANS ARMAND P [US], et al
- [X] EP 1010995 A1 20000621 - EASTMAN KODAK CO [US]
- [X] US 5725729 A 19980310 - GREIFF PAUL [US]
- See references of WO 03071334A1
Designated contracting state (EPC)
DE FR NL
DOCDB simple family (publication)
US 2004150869 A1 20040805; US 7102808 B2 20060905; DE 60322035 D1 20080821; EP 1486815 A1 20041215; EP 1486815 A4 20050824; EP 1486815 B1 20080709; JP 2003241122 A 20030827; JP 3558066 B2 20040825; KR 100974480 B1 20100810; KR 20040084638 A 20041006; TW 200402552 A 20040216; TW 591257 B 20040611; WO 03071334 A1 20030828
DOCDB simple family (application)
US 47495903 A 20031016; DE 60322035 T 20030217; EP 03706951 A 20030217; JP 0301659 W 20030217; JP 2002042029 A 20020219; KR 20037013644 A 20030217; TW 92100597 A 20030113