EP 1488023 A1 20041222 - METHOD FOR COATING A SUBSTRATE AND DEVICE FOR CARRYING OUT THE METHOD
Title (en)
METHOD FOR COATING A SUBSTRATE AND DEVICE FOR CARRYING OUT THE METHOD
Title (de)
VERFAHREN ZUM BESCHICHTEN EINES SUBSTRATES UND VORRICHTUNG ZUR DURCHF HRUNG DES VERFAHRENS
Title (fr)
PROCEDE DE REVETEMENT D'UN SUBSTRAT ET DISPOSITIF CORRESPONDANT
Publication
Application
Priority
- DE 10212923 A 20020322
- EP 0302860 W 20030319
Abstract (en)
[origin: WO03080893A1] The invention relates to a method and a device for coating at least one substrate with a thin layer in a processing chamber (2) of a reactor (1). A solid or liquid starting material (15) stored at least in a reservoir (12) is guided into the processing chamber (2) as a gas or an aerosol by means of a carrier gas, where it is condensed on the substrate (3). The solid or liquid starting material (15) is maintained at a source temperature which is higher than the substrate temperature. In order to enable a targeted adjustment of the composition, sequence of layers and properties of the contact surface which determine the properties of the components, the carrier gas flows through the starting material (15) and the supply of the gaseous starting material to the processing chamber (2) is controlled by means of at least one valve (8) and one mass flow regulator (9).
IPC 1-7
IPC 8 full level
H05B 33/10 (2006.01); B05D 3/00 (2006.01); C23C 14/12 (2006.01); C23C 14/22 (2006.01); C23C 16/455 (2006.01); H01L 21/363 (2006.01); C23C 16/44 (2006.01); H10K 99/00 (2023.01)
CPC (source: EP KR)
C23C 14/12 (2013.01 - EP KR); C23C 14/22 (2013.01 - EP KR); C23C 14/228 (2013.01 - EP); C23C 16/448 (2013.01 - KR); C23C 16/45525 (2013.01 - EP); C23C 16/52 (2013.01 - KR); H10K 71/16 (2023.02 - EP); H10K 71/164 (2023.02 - EP)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 03080893 A1 20031002; WO 03080893 B1 20031218; AU 2003215669 A1 20031008; DE 10212923 A1 20040108; EP 1488023 A1 20041222; JP 2005520687 A 20050714; KR 20040104527 A 20041210; TW 200304959 A 20031016
DOCDB simple family (application)
EP 0302860 W 20030319; AU 2003215669 A 20030319; DE 10212923 A 20020322; EP 03744817 A 20030319; JP 2003578614 A 20030319; KR 20047014802 A 20030319; TW 92106298 A 20030321