EP 1488271 A4 20130529 - A MICROELECTROMECHANICAL SYSTEMS DEVICE AND METHOD FOR FABRICATING SAME
Title (en)
A MICROELECTROMECHANICAL SYSTEMS DEVICE AND METHOD FOR FABRICATING SAME
Title (de)
EINRICHTUNG IN MIKROMECHANISCHEN SYSTEMEN UND VERFAHREN ZU IHRER HERSTELLUNG
Title (fr)
DISPOSITIF SYSTEMES MICRO-ELECTROMECANIQUES ET LEUR PROCEDE DE PRODUCTION
Publication
Application
Priority
- US 0213462 W 20020429
- US 8489302 A 20020227
Abstract (en)
[origin: US6574033B1] One aspect of the invention provides a method for fabricating a microelectromechanical systems device. The method comprises fabricating an array of first elements, each first element conforming to a first geometry; fabricating at least one array of second elements, each second element conforming to a second geometry; wherein fabricating the arrays comprises selecting a defining aspect of each of the first and second geometries based on a defining characteristic of each of the first and second elements; and normalizing differences in an actuation voltage required to actuate each of the first and second elements, wherein the differences are as a result of the selected defining aspect, the defining characteristic of each of the elements being unchanged.
IPC 8 full level
B81B 3/00 (2006.01); G02B 26/00 (2006.01); H02N 1/00 (2006.01)
CPC (source: EP KR US)
G02B 26/00 (2013.01 - KR); G02B 26/001 (2013.01 - EP US); G02B 26/08 (2013.01 - KR)
Citation (search report)
- [X] US 6040937 A 20000321 - MILES MARK W [US]
- [X] US 2002015215 A1 20020207 - MILES MARK W [US]
- [A] US 2001003487 A1 20010614 - MILES MARK W [US]
- See references of WO 03073151A1
Designated contracting state (EPC)
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
DOCDB simple family (publication)
US 6574033 B1 20030603; AU 2002308517 A1 20030909; CN 100472270 C 20090325; CN 1633616 A 20050629; EP 1488271 A1 20041222; EP 1488271 A4 20130529; JP 2005525776 A 20050825; JP 4223406 B2 20090212; KR 100944922 B1 20100303; KR 20040088549 A 20041016; US RE42119 E 20110208; WO 03073151 A1 20030904
DOCDB simple family (application)
US 8489302 A 20020227; AU 2002308517 A 20020429; CN 02828352 A 20020429; EP 02806893 A 20020429; JP 2003571782 A 20020429; KR 20047013279 A 20020429; US 0213462 W 20020429; US 14421005 A 20050602