EP 1488445 A2 20041222 - TUBE MAGNETRON
Title (en)
TUBE MAGNETRON
Title (de)
ROHRMAGNETRON
Title (fr)
MAGNETRON TUBULAIRE
Publication
Application
Priority
- DE 0300962 W 20030324
- DE 10213043 A 20020322
Abstract (en)
[origin: WO03081634A2] The invention relates to a tube magnetron in a vacuum coating plant, provided with a hollow rotating tube target arrangement and a magnet system, comprising two magnetic field maxima in cross-section arranged in the axial longitudinal direction of the tube target arrangement and therein. The magnetic field passes through the tube target arrangement and the tube target arrangement comprises target plates running longitudinally which are fixed to a target support. The aim of the invention is to achieve an improved process uniformity as an essential condition for a high layer quality on the substrate, in particular on the use of target plates made from ceramics for example, ITO, zinc oxide, silicon and other ceramic, ceramic-like and/or high-melting materials. Said aim is achieved whereby the target plates are arranged adjacent to each other to form a polygon in cross-section.
IPC 1-7
IPC 8 full level
H01J 37/34 (2006.01)
CPC (source: EP US)
H01J 37/3405 (2013.01 - EP US)
Citation (search report)
See references of WO 03081634A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 03081634 A2 20031002; WO 03081634 A3 20040304; AU 2003233915 A1 20031008; DE 10213043 A1 20031009; DE 10213043 B4 20081030; EP 1488445 A2 20041222; US 2005145488 A1 20050707
DOCDB simple family (application)
DE 0300962 W 20030324; AU 2003233915 A 20030324; DE 10213043 A 20020322; EP 03727150 A 20030324; US 50881905 A 20050222