EP 1488457 A1 20041222 - SELF-ADJUSTING SERIAL CIRCUIT OF THIN LAYERS AND METHOD FOR PRODUCTION THEREOF
Title (en)
SELF-ADJUSTING SERIAL CIRCUIT OF THIN LAYERS AND METHOD FOR PRODUCTION THEREOF
Title (de)
SELBSTJUSTIERENDE SERIENVERSCHALTUNG VON DÜNNSCHICHTEN UND VERFAHREN ZUR HERSTELLUNG
Title (fr)
CIRCUIT SERIE DE MINCES COUCHES A REGLAGE AUTOMATIQUE ET SON PROCEDE DE PRODUCTION
Publication
Application
Priority
- EP 03720338 A 20030318
- EP 0302864 W 20030318
- EP 02006162 A 20020319
Abstract (en)
[origin: WO03079448A1] The invention relates to a self-adjusting serial circuit of thin layers and method for production thereof. The invention is characterised in that electrically conducting conductor tracks (20) are applied to a substrate (10), whereupon several main deposit layers (30, 40, 50) of conducting, semi-conducting or insulating materials are applied to the substrate. The application of the layers is carried out at various angles of incidence to the surface of the substrate.
IPC 1-7
IPC 8 full level
H01L 31/04 (2006.01); H01L 27/142 (2006.01); H01L 31/18 (2006.01)
CPC (source: EP KR US)
H01L 31/046 (2014.12 - EP US); H01L 31/0465 (2014.12 - EP KR US); Y02E 10/50 (2013.01 - EP KR US); Y10S 438/944 (2013.01 - EP US)
Citation (search report)
See references of WO 03079448A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 03079448 A1 20030925; AU 2003223969 A1 20030929; EP 1357602 A1 20031029; EP 1488457 A1 20041222; JP 2005521247 A 20050714; KR 20040108669 A 20041224; US 2006110860 A1 20060525; US 7339248 B2 20080304
DOCDB simple family (application)
EP 0302864 W 20030318; AU 2003223969 A 20030318; EP 02006162 A 20020319; EP 03720338 A 20030318; JP 2003577342 A 20030318; KR 20047014714 A 20030318; US 50819405 A 20050627