EP 1493181 A2 20050105 - METHOD FOR TRANSFERRING ELEMENTS BETWEEN SUBSTRATES
Title (en)
METHOD FOR TRANSFERRING ELEMENTS BETWEEN SUBSTRATES
Title (de)
VERFAHREN ZUR ÜBERTRAGUNG VON SUBSTRAT-ELEMENTEN AUF EIN ANDERES SUBSTRAT
Title (fr)
PROCEDE DE TRANSFERT D'ELEMENTS DE SUBSTRAT A SUBSTRAT
Publication
Application
Priority
- FR 0300905 W 20030321
- FR 0203693 A 20020325
Abstract (en)
[origin: WO03081664A2] The invention concerns a method for transferring at least an element from a donor substrate to a target substrate (40). The invention is characterized in that it consists in securing the element to a handle-substrate via a bonding layer (32) capable of degradation and in producing a degradation of the bonding layer during a step which consists in releasing the element to be transferred. The invention is applicable to the transfer of components.
IPC 1-7
IPC 8 full level
H01L 21/67 (2006.01); H01L 21/68 (2006.01); H01L 21/762 (2006.01)
CPC (source: EP US)
H01L 21/6835 (2013.01 - EP US); H01L 21/76254 (2013.01 - EP US); H01L 2221/68318 (2013.01 - EP US); H01L 2221/68359 (2013.01 - EP US); H01L 2221/68368 (2013.01 - EP US)
Citation (search report)
See references of WO 03081664A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 03081664 A2 20031002; WO 03081664 A3 20040401; EP 1493181 A2 20050105; FR 2837620 A1 20030926; FR 2837620 B1 20050429; JP 2005532674 A 20051027; US 2005178495 A1 20050818
DOCDB simple family (application)
FR 0300905 W 20030321; EP 03725311 A 20030321; FR 0203693 A 20020325; JP 2003579275 A 20030321; US 50891704 A 20040922